Controlling the intrinsic bending of hetero-epitaxial silicon carbide micro-cantilevers

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Author(s)
Ranjbar Kermany, Atieh
Iacopi, Francesca
Year published
2015
Metadata
Show full item recordJournal Title
Journal of Applied Physics
Volume
118
Copyright Statement
© 2015 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Applied Physics, 118, 155304–1 – 155304–5 and may be found at http://doi.org/10.1063/1.4934188.
Subject
Physical Sciences not elsewhere classified
Mathematical Sciences
Physical Sciences
Engineering