Controlling the intrinsic bending of hetero-epitaxial silicon carbide micro-cantilevers
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Journal of Applied Physics
© 2015 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Applied Physics, 118, 155304–1 – 155304–5 and may be found at http://doi.org/10.1063/1.4934188.
Physical Sciences not elsewhere classified