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  • Investigating extremely low resistance ohmic contacts to silicon carbide using a novel test structure

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    Author(s)
    Pan, Yue
    Collins, Aaron M
    Algahtani, Fahid
    Leech, Patrick W
    Reeves, Geoffrey K
    Tanner, Philip
    Holland, Anthony S
    Griffith University Author(s)
    Tanner, Philip G.
    Year published
    2013
    Metadata
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    Abstract
    Low resistance contracts to highly doped silicon carbide (SiC) are investigated. Using a novel test structure that is easy to fabricate and easy to use, this paper demonstrates how it is used to reliably determine relatively low specific contact resistivities which vary with heat treatment. The test structure requires no error correction and is not affected by parasitic resistances. Using the test structure, small changes in specific contact resistivity are determined for small temperature changes. Results will be presented and discussed on the application of this novel test structure for nickel to highly doped SiC. 頨2013) ...
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    Low resistance contracts to highly doped silicon carbide (SiC) are investigated. Using a novel test structure that is easy to fabricate and easy to use, this paper demonstrates how it is used to reliably determine relatively low specific contact resistivities which vary with heat treatment. The test structure requires no error correction and is not affected by parasitic resistances. Using the test structure, small changes in specific contact resistivity are determined for small temperature changes. Results will be presented and discussed on the application of this novel test structure for nickel to highly doped SiC. 頨2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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    Conference Title
    MICRO/NANO MATERIALS, DEVICES, AND SYSTEMS
    Volume
    8923
    Publisher URI
    http://soacconference.com.au/
    Copyright Statement
    © The Author(s) 2013. The attached file is reproduced here in accordance with the copyright policy of the publisher. For information about this conference please refer to the conference’s website or contact the authors.
    Subject
    Biomedical Instrumentation
    Publication URI
    http://hdl.handle.net/10072/113273
    Collection
    • Conference outputs

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