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dc.contributor.authorRosa, MA
dc.contributor.authorNgo, NQ
dc.contributor.authorSweatman, D
dc.contributor.authorDimitrijev, S
dc.contributor.authorHarrison, HB
dc.date.accessioned2017-05-03T13:45:17Z
dc.date.available2017-05-03T13:45:17Z
dc.date.issued1999
dc.date.modified2010-10-12T06:56:41Z
dc.identifier.issn1077-260X
dc.identifier.doi10.1109/2944.806748
dc.identifier.urihttp://hdl.handle.net/10072/12307
dc.description.abstractThis paper presents a new cost-effective method for self-aligning optical fibers on silicon platforms and for achieving optical quality end-polished silicon-on-insulator (SOI) rib waveguide devices using wet chemical micromachining techniques. Through accurate alignment to the (011) plane of the (100) device layer of a SOI wafer, rib waveguide devices with self-alignment features are fabricated with the ends of each waveguide wet etched and concurrently polished providing an optical quality facet or fiber-to-waveguide interface. Eliminating the need to saw cut and then mechanically polish the ends of fabricated devices, the overall fabrication process is simplified whilst also providing an integrated optic fiber alignment capability at the ends of the fabricated waveguide devices with an alignment accuracy limited by fiber size tolerance. Experimental measurements were carried out to verify the optical quality of the waveguide facets formed using this new technique which proved excess facet losses of practically unmeasurable quantities
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.format.extent396395 bytes
dc.format.extent29541 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypetext/plain
dc.languageEnglish
dc.language.isoeng
dc.publisherInstitute of Electrical and Electronics Engineers
dc.publisher.placeUSA
dc.relation.ispartofpagefrom1249
dc.relation.ispartofpageto1254
dc.relation.ispartofissue5
dc.relation.ispartofjournalIEEE Journal on Selected Topics in Quantum Electronics
dc.relation.ispartofvolume5
dc.subject.fieldofresearchAtomic, molecular and optical physics
dc.subject.fieldofresearchQuantum physics
dc.subject.fieldofresearchcode5102
dc.subject.fieldofresearchcode5108
dc.titleSelf-Alignment of Optical Fibers with Optical Quality End-Polished Silicon Rib Waveguides Using Wet Chemical Micromachining Techniques
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.rights.copyright© 1999 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
gro.date.issued1999
gro.hasfulltextFull Text
gro.griffith.authorHarrison, Barry B.
gro.griffith.authorDimitrijev, Sima


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