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dc.contributor.authorZawawi, Siti Aisyah
dc.contributor.authorHamzah, Azrul Azlan
dc.contributor.authorMajlis, Burhanuddin Yeop
dc.contributor.authorMohd-Yasin, Faisal
dc.date.accessioned2018-02-26T02:58:20Z
dc.date.available2018-02-26T02:58:20Z
dc.date.issued2016
dc.identifier.isbn9781509023837
dc.identifier.doi10.1109/SMELEC.2016.7573582
dc.identifier.urihttp://hdl.handle.net/10072/123940
dc.description.abstractA new design of microelectromechanical systems (MEMS) condenser microphone employing silicon carbide (SiC) diaphragm is proposed for the sonic detection. The sensing structure consists of SiC thin film as the top plate and perforated Si as the back plate. The numerical analysis and simulation studies compare the mechanical performances of the square-shape SiC diaphragm. Four parameters are considered i.e. resonance frequency, cutoff frequency, maximum deflection and maximum stress. The theoretical and simulated results match closely. Overall, the 680 μm × 680 μm SiC diaphragm with the thickness of 1.00 μm gives the optimized mechanical performances for the sonic detection.
dc.description.peerreviewedYes
dc.languageEnglish
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.publisher.placeUnited States
dc.relation.ispartofconferencename12th IEEE International Conference on Semiconductor Electronics (ICSE)
dc.relation.ispartofconferencetitle2016 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS (ICSE) PROCEEDINGS
dc.relation.ispartofdatefrom2016-08-17
dc.relation.ispartofdateto2016-08-19
dc.relation.ispartoflocationKaula Lumpur, MALAYSIA
dc.relation.ispartofpagefrom25
dc.relation.ispartofpageto28
dc.relation.ispartofvolume2016-September
dc.subject.fieldofresearchElectronics, sensors and digital hardware not elsewhere classified
dc.subject.fieldofresearchcode400999
dc.titleMechanical Analysis of Condenser Microphone Based on Silicon Carbide Diaphragm for Sonic Detection
dc.typeConference output
dc.type.descriptionE1 - Conferences
dc.type.codeE - Conference Publications
gro.hasfulltextNo Full Text
gro.griffith.authorMohd-Yasin, Faisal


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    Contains papers delivered by Griffith authors at national and international conferences.

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