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dc.contributor.authorLeech, PW
dc.contributor.authorHolland, AS
dc.contributor.authorReeves, GK
dc.contributor.authorPan, Y
dc.contributor.authorRidgway, M
dc.contributor.authorTanner, P
dc.date.accessioned2018-03-15T23:53:18Z
dc.date.available2018-03-15T23:53:18Z
dc.date.issued2015
dc.identifier.isbn9781510806238
dc.identifier.issn0272-9172
dc.identifier.doi10.1557/opl.2015.284
dc.identifier.urihttp://hdl.handle.net/10072/125225
dc.description.abstractThe effect of low energy implantation of P or C ions in 3C-SiC on the properties of Ti/Ni/Au contacts has been examined for doses in the range 1013-1015 ions/cm2. Measurements of specific contact resistance, ρc, were performed using the two-contact circular test structure. The magnitude of ρc for the Ti/Ni/Au contacts on unimplanted SiC was 1.29 x 10−6 Ω.cm2. The value of ρc increased significantly at an implant dose of 1 x 1015 ions/cm2. The dependence of ρc on ion dose has been measured using both C and P implant species.
dc.description.peerreviewedYes
dc.languageEnglish
dc.publisherMaterials Research Society
dc.publisher.placeUnited States
dc.relation.ispartofconferencename2014 MRS Fall Meeting & Exhibit
dc.relation.ispartofconferencetitleMaterials Research Society Symposium Proceedings
dc.relation.ispartofdatefrom2014-11-30
dc.relation.ispartofdateto2014-12-05
dc.relation.ispartoflocationBoston, Massachusetts, USA
dc.relation.ispartofpagefrom39
dc.relation.ispartofpageto44
dc.relation.ispartofvolume1743
dc.subject.fieldofresearchMaterials Engineering not elsewhere classified
dc.subject.fieldofresearchcode091299
dc.titleEffect of Low Energy Implantation on the Properties of Ti/Ni/Au Contacts to n-SiC
dc.typeConference output
dc.type.descriptionE1 - Conferences
dc.type.codeE - Conference Publications
dc.description.versionVersion of Record (VoR)
gro.rights.copyright© 2015 Materials Research Society, published by Cambridge University Press. The attached file is reproduced here in accordance with the copyright policy of the publisher. Please refer to the conference's website for access to the definitive, published version.
gro.hasfulltextFull Text
gro.griffith.authorTanner, Philip G.


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    Contains papers delivered by Griffith authors at national and international conferences.

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