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Modelling MEMS Manufacturability in Virtual Prototyping CAD Tool

dc.contributor.convenorSPIE The International Society for Optic
dc.contributor.authorSitte, Renate
dc.contributor.editorNeil Bergman
dc.date.accessioned2017-05-03T11:26:11Z
dc.date.available2017-05-03T11:26:11Z
dc.date.issued2001
dc.date.modified2007-03-10T05:04:40Z
dc.identifier.urihttp://hdl.handle.net/10072/1395
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherSPIE - The International Society for Optical Engineering
dc.publisher.placeUSA
dc.relation.ispartofbookorjournalProceedings of SPIE
dc.relation.ispartofconferencenameElectronics and Structures for MEMS II
dc.relation.ispartofconferencetitleProceedings of SPIE
dc.relation.ispartofdatefrom2001-12-17
dc.relation.ispartofdateto2001-12-19
dc.relation.ispartoflocationAdelaide, SA
dc.subject.fieldofresearchcode290303
dc.titleModelling MEMS Manufacturability in Virtual Prototyping CAD Tool
dc.typeConference output
dc.type.descriptionE1 - Conferences
dc.type.codeE - Conference Publications
gro.facultyGriffith Sciences, School of Information and Communication Technology
gro.date.issued2001
gro.hasfulltextNo Full Text
gro.griffith.authorSitte, Renate


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    Contains papers delivered by Griffith authors at national and international conferences.

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