Show simple item record

dc.contributor.authorDimitrijev, Sima
dc.contributor.authorHan, Jisheng
dc.contributor.authorZou, Jin
dc.contributor.editorDevaty, RP
dc.date.accessioned2017-05-03T11:51:39Z
dc.date.available2017-05-03T11:51:39Z
dc.date.issued2006
dc.date.modified2009-09-14T07:15:22Z
dc.identifier.issn0255-5476
dc.identifier.doi10.4028/www.scientific.net/MSF.527-529.975
dc.identifier.urihttp://hdl.handle.net/10072/14378
dc.description.abstractHigh-resolution transmission electron microscopy (HR TEM) reveals an atomically flat SiC surface after oxidation in either NO or dry O2 ambients. This reopens the question of the origin of the electronically active defects at the SiO2-SiC interface, whose density remains orders of magnitude higher than in the SiO2-Si interface. Capacitance-transient measurements, analysed in this paper, demonstrate that the dominant electronically active defects are in the oxide at tunneling distances from the SiC surface (near-interface traps). The HR TEM results cannot rule out that these traps are related to carbon/oxygen bonds or even nanometer-sized carbon clusters, which resolves the apparent inconsistency with the earlier experimental evidence of carbon accumulation at (or near) the SiO2-SiC interface.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherTrans Tech Publications
dc.publisher.placeSwitzerland
dc.publisher.urihttp://www.scientific.net/0255-5476/
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom975
dc.relation.ispartofpageto978
dc.relation.ispartofjournalMaterials Science Forum
dc.relation.ispartofvolume527-529
dc.rights.retentionY
dc.subject.fieldofresearchPhysical chemistry
dc.subject.fieldofresearchMaterials engineering
dc.subject.fieldofresearchcode3406
dc.subject.fieldofresearchcode4016
dc.titleInvestigation of SiO2-SiC Interface by High-Resolution Transmission Electron Microscope
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.facultyGriffith Sciences, Griffith School of Engineering
gro.date.issued2006
gro.hasfulltextNo Full Text
gro.griffith.authorDimitrijev, Sima


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following Collection(s)

  • Journal articles
    Contains articles published by Griffith authors in scholarly journals.

Show simple item record