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dc.contributor.authorSweatman, Denis
dc.contributor.authorPowell, Oliver
dc.contributor.authorFrancis, Shinoj
dc.contributor.editorDr. Martin Goosey
dc.date.accessioned2017-05-03T12:09:00Z
dc.date.available2017-05-03T12:09:00Z
dc.date.issued2006
dc.date.modified2009-12-01T05:30:57Z
dc.identifier.issn03056120
dc.identifier.doi10.1108/03056120610700720
dc.identifier.urihttp://hdl.handle.net/10072/14450
dc.description.abstractPurpose - To detail results of research into optical waveguides fabricated from silicon on insulator (SOI) for on-chip high speed applications and from polymer for more general applications. Design/methodology/approach - This paper shows the processes for wet etch fabrication of SOI single mode rib waveguides including compact crystal plane turning mirrors. Losses for the mirror facets are determined by difference measurements. Multimode polymer strip waveguides are fabricated on glass substrates by conventional photolithography using SU8 polymer and tested for attenuation. Findings - Fabrication of compact turning mirrors for silicon waveguides requires precise alignment of masks and controlled etching of the corner facets in order to obtain correct alignment of the mirror face with the incoming and outgoing waveguides. Measurements of losses per mirror facet show typical losses of 1-2?dB/facet. Suggestions for improvements are made. Preliminary results for polymer waveguides show the necessity for high quality lithography. Originality/value - Optical interconnects for high speed communication on board and on chip are part of the ITRS Road Map for advanced interconnects. Design of optical elements to enable this, including reduction of on-chip area by turning mirrors, is necessary for on-chip optical technology to be successful. Compact etched mirrors described here extend previous designs and enable fabrication at any position on-chip. New etch mask techniques for silicon waveguide fabrication are also described.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherEmerald Group Publishing Limited
dc.publisher.placeBradford UK
dc.publisher.urihttp://www.emeraldinsight.com/info/journals/cw/cw.jsp
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom3
dc.relation.ispartofpageto7
dc.relation.ispartofissue2
dc.relation.ispartofjournalCircuit World
dc.relation.ispartofvolume32
dc.rights.retentionN
dc.subject.fieldofresearchcode291702
dc.titleIntegrated waveguides for optical interconnects
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.date.issued2006
gro.hasfulltextNo Full Text
gro.griffith.authorSweatman, Denis R.
gro.griffith.authorPowell, Oliver J.
gro.griffith.authorFrancis, Shinoj


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