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  • Nitridation of Silicon-Dioxide Films Grown on 6H Silicon Carbide

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    7019.pdf (61.19Kb)
    Author(s)
    Dimitrijev, S
    Li, HF
    Harrison, HB
    Sweatman, D
    Griffith University Author(s)
    Harrison, Barry B.
    Dimitrijev, Sima
    Year published
    1997
    Metadata
    Show full item record
    Journal Title
    IEEE Electron Device Letters
    Volume
    18
    Issue
    5
    Publisher URI
    http://ieeexplore.ieee.org/Xplore/dynhome.jsp
    DOI
    https://doi.org/10.1109/55.568752
    Copyright Statement
    © 1997 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
    Subject
    History, heritage and archaeology
    Publication URI
    http://hdl.handle.net/10072/15748
    Collection
    • Journal articles

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