Nitridation of Silicon-Dioxide Films Grown on 6H Silicon Carbide

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Author(s)
Dimitrijev, S
Li, HF
Harrison, HB
Sweatman, D
Year published
1997
Metadata
Show full item recordJournal Title
IEEE Electron Device Letters
Volume
18
Issue
5
Publisher URI
Copyright Statement
© 1997 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
Subject
History, heritage and archaeology