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dc.contributor.authorPal, J
dc.contributor.authorZhu, Y
dc.contributor.authorDao, D
dc.contributor.authorLu, J
dc.contributor.authorKhan, F
dc.date.accessioned2017-06-15T04:00:59Z
dc.date.available2017-06-15T04:00:59Z
dc.date.issued2015
dc.identifier.issn0167-9317
dc.identifier.doi10.1016/j.mee.2015.02.021
dc.identifier.urihttp://hdl.handle.net/10072/165854
dc.description.abstractIn this paper, contact resistance in single-contact and multi-contact switches, fabricated using MEMSCAP's Metal Multi-User MEMS Process (MetalMUMPs), is characterized, compared, and discussed. The experimental results show that the single-contact switch has a lower contact on-resistance compared to the multi-contact switch. Also, under high carrying current operation of 0.85 A, the contact resistances are 0.426 and 0.155 ohm in the multi-contact switch and the single-contact switch, respectively. The contact pressure is here proved to be the key factor in determining the contact resistance. A smaller nominal contact area can introduce more contact pressure under the same contact force, and therefore a great fraction of surface is actually contacted. Smaller contact resistance can thus be achieved.
dc.description.peerreviewedYes
dc.languageEnglish
dc.language.isoeng
dc.publisherElsevier
dc.publisher.placeNetherlands
dc.relation.ispartofpagefrom13
dc.relation.ispartofpageto16
dc.relation.ispartofjournalMicroelectronic Engineering
dc.relation.ispartofvolume135
dc.subject.fieldofresearchCondensed matter physics
dc.subject.fieldofresearchOther physical sciences
dc.subject.fieldofresearchMicroelectronics
dc.subject.fieldofresearchMicroelectromechanical systems (MEMS)
dc.subject.fieldofresearchElectronics, sensors and digital hardware
dc.subject.fieldofresearchMaterials engineering
dc.subject.fieldofresearchcode5104
dc.subject.fieldofresearchcode5199
dc.subject.fieldofresearchcode400908
dc.subject.fieldofresearchcode401705
dc.subject.fieldofresearchcode4009
dc.subject.fieldofresearchcode4016
dc.titleStudy on contact resistance in single-contact and multi-contact MEMS switches
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
dcterms.licensehttp://creativecommons.org/licenses/by-nc-nd/4.0/
dc.description.versionAccepted Manuscript (AM)
gro.facultyGriffith Sciences, Griffith School of Engineering
gro.rights.copyright© 2015 Elsevier. Licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (http://creativecommons.org/licenses/by-nc-nd/4.0/) which permits unrestricted, non-commercial use, distribution and reproduction in any medium, providing that the work is properly cited.
gro.hasfulltextFull Text
gro.griffith.authorLu, Junwei
gro.griffith.authorZhu, Yong
gro.griffith.authorDao, Dzung V.


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