dc.contributor.author | Pal, J | |
dc.contributor.author | Zhu, Y | |
dc.contributor.author | Dao, D | |
dc.contributor.author | Lu, J | |
dc.contributor.author | Khan, F | |
dc.date.accessioned | 2017-06-15T04:00:59Z | |
dc.date.available | 2017-06-15T04:00:59Z | |
dc.date.issued | 2015 | |
dc.identifier.issn | 0167-9317 | |
dc.identifier.doi | 10.1016/j.mee.2015.02.021 | |
dc.identifier.uri | http://hdl.handle.net/10072/165854 | |
dc.description.abstract | In this paper, contact resistance in single-contact and multi-contact switches, fabricated using MEMSCAP's Metal Multi-User MEMS Process (MetalMUMPs), is characterized, compared, and discussed. The experimental results show that the single-contact switch has a lower contact on-resistance compared to the multi-contact switch. Also, under high carrying current operation of 0.85 A, the contact resistances are 0.426 and 0.155 ohm in the multi-contact switch and the single-contact switch, respectively. The contact pressure is here proved to be the key factor in determining the contact resistance. A smaller nominal contact area can introduce more contact pressure under the same contact force, and therefore a great fraction of surface is actually contacted. Smaller contact resistance can thus be achieved. | |
dc.description.peerreviewed | Yes | |
dc.language | English | |
dc.language.iso | eng | |
dc.publisher | Elsevier | |
dc.publisher.place | Netherlands | |
dc.relation.ispartofpagefrom | 13 | |
dc.relation.ispartofpageto | 16 | |
dc.relation.ispartofjournal | Microelectronic Engineering | |
dc.relation.ispartofvolume | 135 | |
dc.subject.fieldofresearch | Condensed matter physics | |
dc.subject.fieldofresearch | Other physical sciences | |
dc.subject.fieldofresearch | Microelectronics | |
dc.subject.fieldofresearch | Microelectromechanical systems (MEMS) | |
dc.subject.fieldofresearch | Electronics, sensors and digital hardware | |
dc.subject.fieldofresearch | Materials engineering | |
dc.subject.fieldofresearchcode | 5104 | |
dc.subject.fieldofresearchcode | 5199 | |
dc.subject.fieldofresearchcode | 400908 | |
dc.subject.fieldofresearchcode | 401705 | |
dc.subject.fieldofresearchcode | 4009 | |
dc.subject.fieldofresearchcode | 4016 | |
dc.title | Study on contact resistance in single-contact and multi-contact MEMS switches | |
dc.type | Journal article | |
dc.type.description | C1 - Articles | |
dc.type.code | C - Journal Articles | |
dcterms.license | http://creativecommons.org/licenses/by-nc-nd/4.0/ | |
dc.description.version | Accepted Manuscript (AM) | |
gro.faculty | Griffith Sciences, Griffith School of Engineering | |
gro.rights.copyright | © 2015 Elsevier. Licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International (http://creativecommons.org/licenses/by-nc-nd/4.0/) which permits unrestricted, non-commercial use, distribution and reproduction in any medium, providing that the work is properly cited. | |
gro.hasfulltext | Full Text | |
gro.griffith.author | Lu, Junwei | |
gro.griffith.author | Zhu, Yong | |
gro.griffith.author | Dao, Dzung V. | |