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dc.contributor.authorQamar, Afzaal
dc.contributor.authorMahmood, Arshad
dc.contributor.authorSarwar, Tuba
dc.contributor.authorAhmed, Nadeem
dc.date.accessioned2018-12-07T02:08:15Z
dc.date.available2018-12-07T02:08:15Z
dc.date.issued2011
dc.identifier.issn01694332
dc.identifier.doi10.1016/j.apsusc.2011.03.033
dc.identifier.urihttp://hdl.handle.net/10072/170291
dc.description.abstractHexagonal SiC thin films have been deposited using radio frequency reactive magnetron sputtering technique by varying the substrate temperature and other deposition conditions. Prior to deposition surface modification of the substrate Si(1 0 0) played an important role in deposition of the hexagonal SiC structure. The effect of substrate temperature during deposition on structure, composition and surface morphology of the SiC films has been analyzed using atomic force microscopy, Fourier transform infrared spectroscopy and spectroscopic ellipsometry. X-ray diffraction in conventional ?-2? mode and omega scan mode revealed that the deposited films were crystalline having 8H-SiC structure and crystallinity improved with increase of deposition temperature. The bonding order and Si-C composition within the films showed improvement with the increase of deposition temperature. The surface of thin films grew in the shape of globes and columns depending upon deposition temperature. The optical properties also showed improvement with increase of deposition temperature and the results obtained by ellipsometry reinforced the results of other techniques.
dc.description.peerreviewedYes
dc.languageEnglish
dc.language.isoeng
dc.publisherElsevier
dc.publisher.placeNetherlands
dc.relation.ispartofpagefrom6923
dc.relation.ispartofpageto6927
dc.relation.ispartofissue15
dc.relation.ispartofjournalApplied Surface Science
dc.relation.ispartofvolume257
dc.subject.fieldofresearchSynthesis of Materials
dc.subject.fieldofresearchcode030306
dc.titleSynthesis and characterization of porous crystalline SiC thin films prepared by radio frequency reactive magnetron sputtering technique
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.hasfulltextNo Full Text
gro.griffith.authorQamar, Afzaal


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