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  • Self-Aligned Interdigitated Transducers for Acoustofluidics

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    Author(s)
    Ma, Zhichao
    Teo, Adrian JT
    Tan, Say Hwa
    Ai, Ye
    Nam-Trung, Nguyen
    Griffith University Author(s)
    Nguyen, Nam-Trung
    Tan, Say Hwa H.
    Year published
    2016
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    Abstract
    The surface acoustic wave (SAW) is effective for the manipulation of fluids and particles at microscale. The current approach of integrating interdigitated transducers (IDTs) for SAW generation into microfluidic channels involves complex and laborious microfabrication steps. These steps often require full access to clean room facilities and hours to align the transducers to the precise location. This work presents an affordable and innovative method for fabricating SAW-based microfluidic devices without the need for clean room facilities and alignment. The IDTs and microfluidic channels are fabricated using the same process ...
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    The surface acoustic wave (SAW) is effective for the manipulation of fluids and particles at microscale. The current approach of integrating interdigitated transducers (IDTs) for SAW generation into microfluidic channels involves complex and laborious microfabrication steps. These steps often require full access to clean room facilities and hours to align the transducers to the precise location. This work presents an affordable and innovative method for fabricating SAW-based microfluidic devices without the need for clean room facilities and alignment. The IDTs and microfluidic channels are fabricated using the same process and thus are precisely self-aligned in accordance with the device design. With the use of the developed fabrication approach, a few types of different SAW-based microfluidic devices have been fabricated and demonstrated for particle separation and active droplet generation.
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    Journal Title
    Micromachines
    Volume
    7
    Issue
    12
    DOI
    https://doi.org/10.3390/mi7120216
    Copyright Statement
    © 2016 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).
    Subject
    Microelectromechanical systems (MEMS)
    Nanotechnology
    Publication URI
    http://hdl.handle.net/10072/172056
    Collection
    • Journal articles

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