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  • Fabrication and Characterization of Gold Nanohole Electrode Arrays

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    Author(s)
    Rauf, Sakandar
    Shiddiky, Muhammad JA
    Asthana, Amit
    Dimitrov, Krassen
    Griffith University Author(s)
    Shiddiky, Muhammad J.
    Year published
    2012
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    Abstract
    We report a fabrication method for gold nanohole electrodes array using photolithography, deep reactive ion etching, wet etching, and focused ion beam lithography techniques. The electrode arrays were fabricated by drilling of nanoholes on a 100 nm silicon nitride membrane over a large area of titanium/gold thin film, exposing disk-type gold nanoelectrodes at the base of holes. The electrode arrays were characterized using scanning electron microscopy (SEM), cyclic voltammetry (CV), and chronoamperometry (CA). SEM imaging of the arrays showed that the each hole is circular at the mouth and cone recessed disk (truncated cone) ...
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    We report a fabrication method for gold nanohole electrodes array using photolithography, deep reactive ion etching, wet etching, and focused ion beam lithography techniques. The electrode arrays were fabricated by drilling of nanoholes on a 100 nm silicon nitride membrane over a large area of titanium/gold thin film, exposing disk-type gold nanoelectrodes at the base of holes. The electrode arrays were characterized using scanning electron microscopy (SEM), cyclic voltammetry (CV), and chronoamperometry (CA). SEM imaging of the arrays showed that the each hole is circular at the mouth and cone recessed disk (truncated cone) at the base. Near “steady-state” voltammetric behavior was achieved for the oxidation of 1 mM ferrocenedicarboxylic acid in 10 mM phosphate buffered saline (PBS) at these electrode arrays. The steady-state responses increase with increasing the number of nanoholes in the array. Because of good reproducibility, high accuracy, and miniaturization compatibility of the proposed fabrication technique, we believe that it has potential applications in developing portable devices for biosensing.
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    Journal Title
    Sensors and Actuators, B: Chemical
    Volume
    173
    DOI
    https://doi.org/10.1016/j.snb.2012.07.053
    Copyright Statement
    © 2012 Elsevier. Licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International Licence which permits unrestricted, non-commercial use, distribution and reproduction in any medium, providing that the work is properly cited.
    Subject
    Atomic, molecular and optical physics
    Analytical chemistry
    Analytical chemistry not elsewhere classified
    Materials engineering
    Publication URI
    http://hdl.handle.net/10072/172451
    Collection
    • Journal articles

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