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  • Modeling of Intergrated Circuit Yield Loss Mechanisms

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    Author(s)
    Stamenkovic, Z
    Stojadinovic, N
    Dimitrijev, S
    Griffith University Author(s)
    Dimitrijev, Sima
    Year published
    1996
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    Abstract
    A yield model suited for application in a yield control system and based on in-line inspections of control wafers containing the corresponding test structures has been proposed. It is shown that the proposed yield model and yield control system can be used for modeling yield loss mechanisms and predicting efficient investments which are required in order to ensure a competitive yield of integrated circuits. An approach for the extraction of chip critical areas associated with the corresponding yield loss mechanism has been described.A yield model suited for application in a yield control system and based on in-line inspections of control wafers containing the corresponding test structures has been proposed. It is shown that the proposed yield model and yield control system can be used for modeling yield loss mechanisms and predicting efficient investments which are required in order to ensure a competitive yield of integrated circuits. An approach for the extraction of chip critical areas associated with the corresponding yield loss mechanism has been described.
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    Journal Title
    IEEE Transactions on Semiconductor Manufacturing
    Volume
    9
    Issue
    2
    Publisher URI
    http://www.ieee.org/portal/site
    DOI
    https://doi.org/10.1109/66.492821
    Copyright Statement
    © 1996 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
    Subject
    Forestry biomass and bioproducts
    Manufacturing engineering
    Publication URI
    http://hdl.handle.net/10072/19932
    Collection
    • Journal articles

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