Show simple item record

dc.contributor.authorYang, J.
dc.contributor.authorJ Kong, F.
dc.date.accessioned2017-05-03T15:10:20Z
dc.date.available2017-05-03T15:10:20Z
dc.date.issued2002
dc.identifier.issn00036951
dc.identifier.doi10.1063/1.1532547
dc.identifier.urihttp://hdl.handle.net/10072/21762
dc.description.abstractA two-dimensional numerical simulation model of interface states in scanning capacitance microscopy (SCM) measurements of p-n junctions is presented. In the model, amphoteric interface states with two transition energies in the Si band gap are represented as fixed charges to account for their behavior in SCM measurements. The interface states are shown to cause a stretch-out and a parallel shift of the capacitance-voltage characteristics in the depletion and neutral regions of p-n junctions, respectively. This explains the discrepancy between the SCM measurement and simulation near p-n junctions, and thus modeling interface states is crucial for SCM dopant profiling of p-n junctions.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherAmerican Institute of Physics
dc.publisher.placeUSA
dc.relation.ispartofpagefrom4973
dc.relation.ispartofpageto4975
dc.relation.ispartofissue26
dc.relation.ispartofjournalApplied Physics Letters
dc.relation.ispartofvolume81
dc.subject.fieldofresearchPhysical Sciences
dc.subject.fieldofresearchEngineering
dc.subject.fieldofresearchTechnology
dc.subject.fieldofresearchcode02
dc.subject.fieldofresearchcode09
dc.subject.fieldofresearchcode10
dc.titleSimulation of interface states effect on the scanning capacitance microscopy measurement of p–n junctions
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.date.issued2015-02-12T00:44:42Z
gro.hasfulltextNo Full Text
gro.griffith.authorKong, Frederick CJ.


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following Collection(s)

  • Journal articles
    Contains articles published by Griffith authors in scholarly journals.

Show simple item record