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dc.contributor.authorAdamec, Richarden_US
dc.contributor.authorThiel, Daviden_US
dc.contributor.authorTanner, Philipen_US
dc.date.accessioned2017-04-24T14:57:15Z
dc.date.available2017-04-24T14:57:15Z
dc.date.issued2003en_US
dc.date.modified2009-12-23T07:14:14Z
dc.identifier.doi10.1109/ICSENS.2003.1278954en_AU
dc.identifier.urihttp://hdl.handle.net/10072/27893
dc.description.abstractA multi-axis hotwire anemometer fabricated with bulk micro-machining and thin film semiconductor technologies is presented. Extending the operation of a single axis anemometer into 2 axes allows direction sensing over the full 0࠭ 360࠷hile maintaining the original ability to measure flow velocity via the forced convection heat loss. Eliminating separate heating and sensing elements and combining both functions into single element pairs provides a means of lowering the temperature and power requirements and reducing size and fabrication complexity of the sensor compared to previously seen designs. CAD and modeling have aided in preparation of a suitable design to be fabricated in house using primarily photolithography and wet chemical etching. Successful wind tunnel trials have paved the way for field-testing and a commercially realizable sensor.en_US
dc.description.peerreviewedYesen_US
dc.description.publicationstatusYesen_AU
dc.format.extent270432 bytes
dc.format.extent12258 bytes
dc.format.mimetypeapplication/pdf
dc.format.mimetypetext/plain
dc.languageEnglishen_US
dc.language.isoen_AU
dc.publisherIEEEen_US
dc.publisher.placeUSAen_US
dc.publisher.urihttp://ieeexplore.ieee.org/servlet/opac?punumber=8998en_AU
dc.relation.ispartofconferencenameSecond IEEE International Conference on Sensors Conference 2en_US
dc.relation.ispartofconferencetitleProceedings of IEEE Sensors, 2003: Volume 1en_US
dc.relation.ispartofdatefrom2003-10-22en_US
dc.relation.ispartofdateto2004-10-24en_US
dc.relation.ispartoflocationToronto, Canadaen_US
dc.subject.fieldofresearchcode290805en_US
dc.titleMEMS Wind Direction Detection: From Design to Operationen_US
dc.typeConference outputen_US
dc.type.descriptionE1 - Conference Publications (HERDC)en_US
dc.type.codeE - Conference Publicationsen_US
gro.facultyGriffith Sciences, Griffith School of Engineeringen_US
gro.rights.copyrightCopyright 2003 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.en_AU
gro.date.issued2003
gro.hasfulltextFull Text


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    Contains papers delivered by Griffith authors at national and international conferences.

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