Aluminum induced in situ crystallization of amorphous SiC
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Author(s)
Wang, Li
Dimitrijev, Sima
Tanner, Philip
Zou, Jin
Year published
2009
Metadata
Show full item recordJournal Title
Applied Physics Letters
Volume
94
Publisher URI
Copyright Statement
© 2009 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Applied Physics Letters and may be found at http://dx.doi.org/10.1063/1.3132053
Subject
Physical sciences
Engineering
Microelectronics