Progress towards the creation of iron nanodots using atom lithography

Palmer, AJ; Baker, M; Sang, RT

doi:10.1109/COMMAD.2004.1577561

Author(s)

Palmer, AJ

Baker, M

Sang, RT

Griffith University Author(s)

Sang, Robert T.

Year published

2005

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Abstract

Iron structures with dimensions comparable to the minimum domain size of 5 nm may provide us with a new high-density data storage method. Several limitations have been observed in existing depositional atom lithography schemes for producing these structures. We will present an alternative scheme using metastable neon atom lithographyIron structures with dimensions comparable to the minimum domain size of 5 nm may provide us with a new high-density data storage method. Several limitations have been observed in existing depositional atom lithography schemes for producing these structures. We will present an alternative scheme using metastable neon atom lithography
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Conference Title

Commad 04: 2004 Conference on Optoelectronic and Microelectronic Materials and Devices, Proceedings