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  • Identification of Polytypes in Sublimation Grown 4H-SiC Crystals by High Resolution X-Ray Diffractometry

    Author(s)
    Dong, Jie
    Wang, Li
    Hu, Xiaobu
    Li, Xianxiang
    Li, Juan
    Jiang, Shouzheng
    Chen, Xiufang
    Xu, Xiangang
    Jiang, Minhua
    Griffith University Author(s)
    Wang, Li
    Year published
    2006
    Metadata
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    Abstract
    4H-SiC single crystal with a diameter of 1.5'' has been grown by the seed sublimation method. Regions of mixed polytypes are assessed by high resolution X-ray diffractometry with the asymmetrical diffraction geometry. Multiple reflections are observed from the rocking curve measurements of a longitudinal cut 4H-SiC slice. Those reflections are indexed to be 2131 and 2131 of 4H-SiC, 2130 , 2131 , 2131 , 2132 and 2132 of 6H-SiC, 2131 , 2132 , 2134 , 2135 and 2137 of 15R-SiC respectively based on the lattice constants of different polytypes in SiC crystal. It is believed that the polytypes can be identified by high resolution ...
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    4H-SiC single crystal with a diameter of 1.5'' has been grown by the seed sublimation method. Regions of mixed polytypes are assessed by high resolution X-ray diffractometry with the asymmetrical diffraction geometry. Multiple reflections are observed from the rocking curve measurements of a longitudinal cut 4H-SiC slice. Those reflections are indexed to be 2131 and 2131 of 4H-SiC, 2130 , 2131 , 2131 , 2132 and 2132 of 6H-SiC, 2131 , 2132 , 2134 , 2135 and 2137 of 15R-SiC respectively based on the lattice constants of different polytypes in SiC crystal. It is believed that the polytypes can be identified by high resolution X-ray diffractometry.
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    Conference Title
    Silicon Carbide and Related Materials
    Publisher URI
    http://www.ttp.net/978-0-87849-442-2.html
    Subject
    Surfaces and Structural Properties of Condensed Matter
    Physical Chemistry (incl. Structural)
    Materials Engineering
    Publication URI
    http://hdl.handle.net/10072/32932
    Collection
    • Conference outputs

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