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dc.contributor.authorRuan, Yong
dc.contributor.authorWang, Weizhong
dc.contributor.authorZhu, Yong
dc.contributor.authorYou, Zheng
dc.date.accessioned2017-11-01T00:16:24Z
dc.date.available2017-11-01T00:16:24Z
dc.date.issued2017
dc.identifier.issn0361-5235
dc.identifier.doi10.1007/s11664-017-5323-1
dc.identifier.urihttp://hdl.handle.net/10072/340365
dc.description.abstractMicroelectromechanical system (MEMS) relays are gradually replacing traditional relays because they are smaller and lighter and consume less power. However, performance parameters of MEMS relays, such as the pull-down voltage, response time, and resonant frequency, often deviate from those originally designed, due to residual stress generated during the fabrication process. We present herein a method to measure this residual stress, based on a metal bridge membrane MEMS relay, with the help of a nanoindenter and the finite-element method (FEM). The testing result lies in a reasonable range, indicating that this simple method is reliable and helpful for MEMS relay optimization.
dc.description.peerreviewedYes
dc.languageEnglish
dc.language.isoeng
dc.publisherSpringer New York LLC
dc.relation.ispartofpagefrom2494
dc.relation.ispartofpageto2500
dc.relation.ispartofissue4
dc.relation.ispartofjournalJournal of Electronic Materials
dc.relation.ispartofvolume46
dc.subject.fieldofresearchElectrical and Electronic Engineering not elsewhere classified
dc.subject.fieldofresearchAtomic, Molecular, Nuclear, Particle and Plasma Physics
dc.subject.fieldofresearchElectrical and Electronic Engineering
dc.subject.fieldofresearchOther Technology
dc.subject.fieldofresearchcode090699
dc.subject.fieldofresearchcode0202
dc.subject.fieldofresearchcode0906
dc.subject.fieldofresearchcode1099
dc.titleAnalysis and Measurement of Residual Stress in Bridge Membrane MEMS Relays
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
dc.description.versionAccepted Manuscript (AM)
gro.rights.copyright© 2017 Springer US. This is an electronic version of an article published in Journal of Electronic Materials, Volume 46, Issue 4, pp 2494–2500, 2017. Journal of Electronic Materials is available online at: http://link.springer.com/ with the open URL of your article.
gro.hasfulltextFull Text
gro.griffith.authorZhu, Yong


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