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  • The effect of micromachining process to the biocompatibility of 3C-SiC membranes

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    NasirPUB2821.pdf (443.4Kb)
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    Accepted Manuscript (AM)
    Author(s)
    Mohd Nasir, NF
    Gan, E
    Shukla, R
    Istivan, T
    Pirogova, E
    Tanner, P
    Holland, AS
    Griffith University Author(s)
    Tanner, Philip G.
    Year published
    2014
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    Abstract
    3C-Silicon Carbide (SiC) has been identified as a potential biomaterial for implantable devices. The prospect of 3C-SiC membrane as the working component for BioMEMS in in-vitro blood pressure sensing could be a new challenge for biomedical engineers. Although, 3C-SiC is known to be biocompatible, but the micromachining process normally used in semiconductor industry might alter the biocompatibility of 3C-SiC. In this study, we investigate the biocompatibility of 3C-SiC which had been subjected to Potassium Hydroxide (KOH) wet etching and reactive ion etching (RIE) using tetrafluoromethane (CF4). The Chinese Hamster Ovary ...
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    3C-Silicon Carbide (SiC) has been identified as a potential biomaterial for implantable devices. The prospect of 3C-SiC membrane as the working component for BioMEMS in in-vitro blood pressure sensing could be a new challenge for biomedical engineers. Although, 3C-SiC is known to be biocompatible, but the micromachining process normally used in semiconductor industry might alter the biocompatibility of 3C-SiC. In this study, we investigate the biocompatibility of 3C-SiC which had been subjected to Potassium Hydroxide (KOH) wet etching and reactive ion etching (RIE) using tetrafluoromethane (CF4). The Chinese Hamster Ovary (CHO) cells were directly cultured onto the prepared samples of 3C-SiC, Si and controls to investigate 3C-SiC biocompatibility. The cells were detached from the substrates and grown further in 6 well plates for another 24 hours at 37°C with 5% CO2 and 95% relative humidity for further testing. Cell viability percentage was determined by Trypan Blue exclusion technique which revealed the preference of the cells to grow and to proliferate on the treated SiC samples. However, the results could be inaccurate due to the nature of the testing which compromises the further ability of the cells to proliferate. Thus, a comparison was made by using Methylthiazolyldiphenyltetrazolium bromide (MTT) assay, a typical cytotoxicity assay, and also PrestoBlue™ reagent (which is the state-of-the-art assay for biocompatibility determination) to confirm the cell viability on the treated and untreated SiC. Thus, the results showed that the cells proliferated better on surface of the 3C-SiC treated with halogenated plasma which indicate the enhancement of biocompatibility of the semiconductor material due to the RIE.
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    Conference Title
    IECBES 2014, Conference Proceedings - 2014 IEEE Conference on Biomedical Engineering and Sciences: "Miri, Where Engineering in Medicine and Biology and Humanity Meet"
    DOI
    https://doi.org/10.1109/IECBES.2014.7047521
    Copyright Statement
    © 2014 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
    Subject
    Biomedical engineering not elsewhere classified
    Publication URI
    http://hdl.handle.net/10072/341304
    Collection
    • Conference outputs

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