Show simple item record

dc.contributor.authorDinh, Toan
dc.contributor.authorPhan, Hoang-Phuong
dc.contributor.authorQamar, Afzaal
dc.contributor.authorWoodfield, Peter
dc.contributor.authorNguyen, Nam-Trung
dc.contributor.authorDao, Dzung Viet
dc.date.accessioned2017-10-26T01:31:10Z
dc.date.available2017-10-26T01:31:10Z
dc.date.issued2017
dc.identifier.issn1057-7157
dc.identifier.doi10.1109/JMEMS.2017.2710354
dc.identifier.urihttp://hdl.handle.net/10072/349519
dc.description.abstractMicroelectromechanical systems sensors have been intensively developed utilizing various physical concepts, such as piezoresistive, piezoelectric, and thermoresistive effects. Among these sensing concepts, the thermoresistive effect is of interest for a wide range of thermal sensors and devices, thanks to its simplicity in implementation and high sensitivity. The effect of temperature on the electrical resistance of some metals and semiconductors has been thoroughly investigated, leading to the significant growth and successful demonstration of thermal-based sensors, such as temperature sensors, convective accelerometers and gyroscopes, and thermal flow sensors. In this paper, we review the fundamentals of the thermoresistive effect in metals and semiconductors. We also discuss the influence of design and fabrication parameters on the thermoresistive sensitivity. This paper includes several desirable features of thermoresistive sensors and recent developments in these sensors are summarized. This review provides insights into how it is affected by various parameters, and useful guidance for industrial designers in terms of high sensitivity and linearity and fast response.
dc.description.peerreviewedYes
dc.languageEnglish
dc.language.isoeng
dc.publisherIEEE
dc.relation.ispartofpagefrom966
dc.relation.ispartofpageto986
dc.relation.ispartofissue5
dc.relation.ispartofjournalJournal of Microelectromechanical Systems
dc.relation.ispartofvolume26
dc.subject.fieldofresearchElectronics, sensors and digital hardware
dc.subject.fieldofresearchManufacturing engineering
dc.subject.fieldofresearchMechanical engineering
dc.subject.fieldofresearchcode4009
dc.subject.fieldofresearchcode4014
dc.subject.fieldofresearchcode4017
dc.titleThermoresistive Effect for Advanced Thermal Sensors: Fundamentals, Design Considerations, and Applications
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.facultyGriffith Sciences, Griffith School of Engineering
gro.hasfulltextNo Full Text
gro.griffith.authorWoodfield, Peter L.
gro.griffith.authorDao, Dzung V.
gro.griffith.authorQamar, Afzaal
gro.griffith.authorNguyen, Nam-Trung
gro.griffith.authorPhan, Hoang Phuong
gro.griffith.authorDinh, Toan K.


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following Collection(s)

  • Journal articles
    Contains articles published by Griffith authors in scholarly journals.

Show simple item record