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  • Steady-state analytical model of suspended p-type 3C-SiC bridges under consideration of Joule heating

    Author(s)
    Balakrishnan, Vivekananthan
    Toan, Dinh
    Hoang-Phuong, Phan
    Kozeki, Takahiro
    Namazu, Takahiro
    Dao, Dzung Viet
    Nam-Trung, Nguyen
    Griffith University Author(s)
    Dao, Dzung V.
    Nguyen, Nam-Trung
    Year published
    2017
    Metadata
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    Abstract
    This paper reports an analytical model and its validation for a released microscale heater made of 3C–SiC thin films. A model for the equivalent electrical and thermal parameters was developed for the two-layer multi-segment heat and electric conduction. The model is based on a 1D energy equation, which considers the temperature-dependent resistivity and allows for the prediction of voltage–current and power–current characteristics of the microheater. The steady-state analytical model was validated by experimental characterization. The results, in particular the nonlinearity caused by temperature dependency, are in good ...
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    This paper reports an analytical model and its validation for a released microscale heater made of 3C–SiC thin films. A model for the equivalent electrical and thermal parameters was developed for the two-layer multi-segment heat and electric conduction. The model is based on a 1D energy equation, which considers the temperature-dependent resistivity and allows for the prediction of voltage–current and power–current characteristics of the microheater. The steady-state analytical model was validated by experimental characterization. The results, in particular the nonlinearity caused by temperature dependency, are in good agreement. The low power consumption of the order of 0.18 mW at approximately 310 K indicates the potential use of the structure as thermal sensors in portable applications.
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    Journal Title
    Journal of Micromechanics and Microengineering
    Volume
    27
    Issue
    7
    DOI
    https://doi.org/10.1088/1361-6439/aa7180
    Subject
    Engineering
    Other engineering not elsewhere classified
    Publication URI
    http://hdl.handle.net/10072/351640
    Collection
    • Journal articles

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