Ultrasonic Energy Transmission and Conversion Using a 2-D MEMS Resonator

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Author(s)
Zhu, Y
Moheimani, SOR
Yuce, MR
Griffith University Author(s)
Year published
2010
Metadata
Show full item recordJournal Title
IEEE Electron Device Letters
Volume
31
Issue
4
Copyright Statement
© 2010 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Subject
Microelectromechanical systems (MEMS)