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dc.contributor.authorZhu, Y
dc.contributor.authorBazaei, A
dc.contributor.authorMoheimani, SOR
dc.contributor.authorYuce, MR
dc.date.accessioned2017-05-03T16:01:27Z
dc.date.available2017-05-03T16:01:27Z
dc.date.issued2010
dc.date.modified2011-04-18T06:55:17Z
dc.identifier.issn0741-3106
dc.identifier.doi10.1109/LED.2010.2058841
dc.identifier.urihttp://hdl.handle.net/10072/37013
dc.description.abstractThis letter describes the design of a micromachined nanopositioner with thermal actuation and sensing capabilities in a single chip. The positioner has a dynamic range of 14.4 m, and the sensor drift is 8.9 nm over 2000 s with a differential sensing scheme. The on-chip displacement sensing enables a feedback control capability. A proportional-integral feedback controller is designed and implemented digitally. The closed-loop step response results show a positioning resolution of 7.9 nm and a time constant of 1.6 ms.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.format.extent341853 bytes
dc.format.mimetypeapplication/pdf
dc.languageEnglish
dc.language.isoeng
dc.publisherInstitute of Electrical and Electronics Engineers
dc.publisher.placeUnited States
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom1161
dc.relation.ispartofpageto1163
dc.relation.ispartofissue10
dc.relation.ispartofjournalIEEE Electron Device Letters
dc.relation.ispartofvolume31
dc.rights.retentionY
dc.subject.fieldofresearchMicroelectromechanical systems (MEMS)
dc.subject.fieldofresearchcode401705
dc.titleA micromachined nanopositioner with on-chip electrothermal actuation and sensing
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.rights.copyright© 2010 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
gro.date.issued2010
gro.hasfulltextFull Text
gro.griffith.authorZhu, Yong


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