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dc.contributor.authorDinh, Toan
dc.contributor.authorHoang-Phuong, Phan
dc.contributor.authorTuan-Khoa, Nguyen
dc.contributor.authorBalakrishnan, Vivekananthan
dc.contributor.authorCheng, Han-Hao
dc.contributor.authorHold, Leonie
dc.contributor.authorLacopi, Alan
dc.contributor.authorNam-Trung, Nguyen
dc.contributor.authorDzung, Viet Dao
dc.date.accessioned2019-05-29T12:32:23Z
dc.date.available2019-05-29T12:32:23Z
dc.date.issued2018
dc.identifier.issn0741-3106
dc.identifier.doi10.1109/LED.2018.2808329
dc.identifier.urihttp://hdl.handle.net/10072/372599
dc.description.abstractThere is a growing interest and demand to develop sensors that operate at high temperatures. In this work, we investigate the temperature sensing properties of unintentionally doped n-type single crystalline cubic silicon carbide (SiC) for high temperatures up to 800 K. A highly sensitive temperature sensor was demonstrated with a temperature coefficient of conductivity (TCC) ranging from 1.96×104 to 5.18×104 ppm/K. The application of this material was successfully demonstrated as a hot film flow sensor with its high signal-to-noise response to air flow at elevated temperatures. The high TCC of the single crystalline SiC film at and above 800 K strongly revealed its potential for highly sensitive thermal sensors working at high temperatures.
dc.description.peerreviewedYes
dc.languageEnglish
dc.publisherIEEE
dc.publisher.placeUnited States of America
dc.relation.ispartofpagefrom580
dc.relation.ispartofpageto583
dc.relation.ispartofissue4
dc.relation.ispartofjournalIEEE Electron Device Letters
dc.relation.ispartofvolume39
dc.subject.fieldofresearchMicroelectromechanical Systems (MEMS)
dc.subject.fieldofresearchElectrical and Electronic Engineering
dc.subject.fieldofresearchcode091306
dc.subject.fieldofresearchcode0906
dc.titleUnintentionally doped epitaxial 3C-SiC (111) nanothin film as material for highly sensitive thermal sensors at high temperatures
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
dc.description.versionPost-print
gro.facultyGriffith Sciences, School of Engineering and Built Environment
gro.rights.copyright© 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
gro.hasfulltextFull Text
gro.griffith.authorIacopi, Alan V.
gro.griffith.authorHold, Leonie K.
gro.griffith.authorDao, Dzung V.
gro.griffith.authorNguyen, Nam-Trung
gro.griffith.authorPhan, Hoang Phuong
gro.griffith.authorDinh, Toan K.
gro.griffith.authorNguyen Tuan, Khoa
gro.griffith.authorBalakrishnan, Vivekananthan


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