Noise and reliability measurement of a three-axis micro-accelerometer
Author(s)
Mohd-Yasin, F
Zaiyadi, N
Nagel, DJ
Ong, DS
Korman, CE
Faidz, AR
Griffith University Author(s)
Year published
2009
Metadata
Show full item recordAbstract
A special measurement system is developed to measure the combined noise and reliability of a three-axis micro-accelerometer. Three parametric tests are provided: gravitational, thermal and acoustical. The measurements were performed on both the in-plane and the out-of-plane axes. The temperature-dependence and acceleration-dependence of the noise was found, in agreement and contrast to the theories. The device is found to be very reliable when subjected to individual tests, but exhibits slight deviations during the combined tests.A special measurement system is developed to measure the combined noise and reliability of a three-axis micro-accelerometer. Three parametric tests are provided: gravitational, thermal and acoustical. The measurements were performed on both the in-plane and the out-of-plane axes. The temperature-dependence and acceleration-dependence of the noise was found, in agreement and contrast to the theories. The device is found to be very reliable when subjected to individual tests, but exhibits slight deviations during the combined tests.
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Journal Title
Microelectronic Engineering
Volume
86
Issue
4-6
Subject
Condensed matter physics
Other physical sciences
Microelectronics
Microelectromechanical systems (MEMS)