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  • Noise and reliability measurement of a three-axis micro-accelerometer

    Author(s)
    Mohd-Yasin, F
    Zaiyadi, N
    Nagel, DJ
    Ong, DS
    Korman, CE
    Faidz, AR
    Griffith University Author(s)
    Mohd-Yasin, Faisal
    Year published
    2009
    Metadata
    Show full item record
    Abstract
    A special measurement system is developed to measure the combined noise and reliability of a three-axis micro-accelerometer. Three parametric tests are provided: gravitational, thermal and acoustical. The measurements were performed on both the in-plane and the out-of-plane axes. The temperature-dependence and acceleration-dependence of the noise was found, in agreement and contrast to the theories. The device is found to be very reliable when subjected to individual tests, but exhibits slight deviations during the combined tests.A special measurement system is developed to measure the combined noise and reliability of a three-axis micro-accelerometer. Three parametric tests are provided: gravitational, thermal and acoustical. The measurements were performed on both the in-plane and the out-of-plane axes. The temperature-dependence and acceleration-dependence of the noise was found, in agreement and contrast to the theories. The device is found to be very reliable when subjected to individual tests, but exhibits slight deviations during the combined tests.
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    Journal Title
    Microelectronic Engineering
    Volume
    86
    Issue
    4-6
    DOI
    https://doi.org/10.1016/j.mee.2008.12.045
    Subject
    Condensed matter physics
    Other physical sciences
    Microelectronics
    Microelectromechanical systems (MEMS)
    Publication URI
    http://hdl.handle.net/10072/37654
    Collection
    • Journal articles

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