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dc.contributor.authorMohd-Yasin, F
dc.contributor.authorZaiyadi, N
dc.contributor.authorNagel, DJ
dc.contributor.authorOng, DS
dc.contributor.authorKorman, CE
dc.contributor.authorFaidz, AR
dc.date.accessioned2017-05-03T15:53:59Z
dc.date.available2017-05-03T15:53:59Z
dc.date.issued2009
dc.date.modified2011-07-22T06:36:03Z
dc.identifier.issn0167-9317
dc.identifier.doi10.1016/j.mee.2008.12.045
dc.identifier.urihttp://hdl.handle.net/10072/37654
dc.description.abstractA special measurement system is developed to measure the combined noise and reliability of a three-axis micro-accelerometer. Three parametric tests are provided: gravitational, thermal and acoustical. The measurements were performed on both the in-plane and the out-of-plane axes. The temperature-dependence and acceleration-dependence of the noise was found, in agreement and contrast to the theories. The device is found to be very reliable when subjected to individual tests, but exhibits slight deviations during the combined tests.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherElsevier
dc.publisher.placeHolland
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom991
dc.relation.ispartofpageto995
dc.relation.ispartofissue4-6
dc.relation.ispartofjournalMicroelectronic Engineering
dc.relation.ispartofvolume86
dc.rights.retentionY
dc.subject.fieldofresearchCondensed matter physics
dc.subject.fieldofresearchOther physical sciences
dc.subject.fieldofresearchMicroelectronics
dc.subject.fieldofresearchMicroelectromechanical systems (MEMS)
dc.subject.fieldofresearchcode5104
dc.subject.fieldofresearchcode5199
dc.subject.fieldofresearchcode400908
dc.subject.fieldofresearchcode401705
dc.titleNoise and reliability measurement of a three-axis micro-accelerometer
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.date.issued2009
gro.hasfulltextNo Full Text
gro.griffith.authorMohd-Yasin, Faisal


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