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dc.contributor.authorPhan, HP
dc.contributor.authorDao, DV
dc.contributor.authorNguyen, NT
dc.contributor.editorMark J. Jackson; Waqar Ahmed
dc.date.accessioned2019-05-29T13:01:38Z
dc.date.available2019-05-29T13:01:38Z
dc.date.issued2017
dc.identifier.isbn9783319671307
dc.identifier.doi10.1007/978-3-319-67132-1_9
dc.identifier.urihttp://hdl.handle.net/10072/378286
dc.description.abstractThe invention of silicon (Si)-based diodes and especially the Si bipolar transistors by Shockley, Bardeen, and Brattain seven decades ago has triggered the era of fast-growing information and computer technologies. As a consequence, the development into microelectronic fabrication technologies has also been extensively investigated and progressed to reduce device size and to increase the integration, as well as to enhance their performance. The growing rate of the state-of-the-art microprocessors has reached above Moore’s law, which states that the number of transistors on a chip doubles roughly every 2 years. This achievement is largely attributed to the advanced micro- and nanofabrication processing [1].
dc.description.peerreviewedYes
dc.languageEnglish
dc.language.isoeng
dc.publisherSpringer International Publishing AG
dc.publisher.placeSwitzerland
dc.relation.ispartofbooktitleMicro and Nanomanufacturing
dc.relation.ispartofchapter9
dc.relation.ispartofchapternumbers18
dc.relation.ispartofpagefrom225
dc.relation.ispartofpageto261
dc.relation.ispartofvolume2
dc.subject.fieldofresearchNanomanufacturing
dc.subject.fieldofresearchcode401806
dc.titleSilicon Micro-/Nanomachining and Applications
dc.typeBook chapter
dc.type.descriptionB1 - Chapters
dc.type.codeB - Book Chapters
gro.facultyGriffith Sciences, School of Engineering and Built Environment
gro.hasfulltextNo Full Text
gro.griffith.authorDao, Dzung V.
gro.griffith.authorNguyen, Nam-Trung


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