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dc.contributor.authorIqbal, A
dc.contributor.authorWalker, G
dc.contributor.authorHold, L
dc.contributor.authorFernandes, A
dc.contributor.authorTanner, P
dc.contributor.authorIacopi, A
dc.contributor.authorMohd-Yasin, F
dc.date.accessioned2019-05-29T12:36:20Z
dc.date.available2019-05-29T12:36:20Z
dc.date.issued2018
dc.identifier.issn0957-4522
dc.identifier.doi10.1007/s10854-017-8163-0
dc.identifier.urihttp://hdl.handle.net/10072/380478
dc.description.abstractAlN thin films have been sputtered on top of the on-axis and 4° off-axis 3C-SiC (111)/Si (111) substrates at various substrate temperatures. The grazing angle incident XRD scans show that all films have major peak at (002) plane and minor peaks at (101) and (102) planes. The AlN films are further characterized in terms of the FWHM of the rocking curve, surface morphology and deposition rate. We observed that the increasing substrate temperature improve the crystal quality of the AlN (002) films, but it has minimal impact on the surface roughness and deposition rate. We also extracted the values for the bi-axial stress, the grain size and the piezoelectric coefficient. Overall, the off-axis 3C-SiC/Si (111) substrates provide a better template for the sputtering of AlN (002) films in term of better crystal quality, lower surface roughness and lower bi-axial stress.
dc.description.peerreviewedYes
dc.languageEnglish
dc.publisherSpringer New York LLC
dc.publisher.placeUnited States
dc.relation.ispartofpagefrom2434
dc.relation.ispartofpageto2446
dc.relation.ispartofissue3
dc.relation.ispartofjournalJournal of Materials Science: Materials in Medicine
dc.relation.ispartofvolume29
dc.subject.fieldofresearchMicroelectronics and Integrated Circuits
dc.subject.fieldofresearchCompound Semiconductors
dc.subject.fieldofresearchMaterials Engineering
dc.subject.fieldofresearchcode090604
dc.subject.fieldofresearchcode091203
dc.subject.fieldofresearchcode0912
dc.titleThe sputtering of AlN films on top of on- and off-axis 3C-SiC (111)/Si (111) substrates at various substrate temperatures
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
dc.description.versionPost-print
gro.facultyGriffith Sciences, School of Environment and Science
gro.rights.copyright© 2018 Springer Netherlands. This is an electronic version of an article published in Journal of Materials Science: Materials in Medicine, 2018, Volume 29, Issue 3, pp 2434–2446. Journal of Materials Science: Materials in Medicine is available online at: http://link.springer.com/ with the open URL of your article.
gro.hasfulltextFull Text
gro.griffith.authorTanner, Philip G.
gro.griffith.authorWalker, Glenn M.
gro.griffith.authorIacopi, Alan V.
gro.griffith.authorHold, Leonie K.
gro.griffith.authorMohd-Yasin, Faisal
gro.griffith.authorIqbal, Abid


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