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dc.contributor.authorZawawi, SA
dc.contributor.authorHamzah, AA
dc.contributor.authorSelvarajan, RS
dc.contributor.authorMajlis, BY
dc.contributor.authorMohd-Yasin, F
dc.date.accessioned2019-05-29T13:07:50Z
dc.date.available2019-05-29T13:07:50Z
dc.date.issued2018
dc.identifier.isbn9781538652831
dc.identifier.doi10.1109/SMELEC.2018.8481244
dc.identifier.urihttp://hdl.handle.net/10072/381014
dc.description.abstractThis paper investigates the effect of squeeze film damping on a micromechanical structure that oscillates due to the pressure distribution on moveable top plate that pair with perforated backplate. The damping characteristics are analytically evaluated to establish the optimum design that increase dynamics performance. The squeezed film damping governing equation, the Reynolds equation, is the fundamental equation of this work. The damping coefficient, air gap damping and viscous damping are calculated by using Skvor's formula. The size of perforation holes and air gap thickness that influencing the squeeze film damping were studied. Analytical solution with various holes structure are summarized. Overall, the 3μm of hole radius, 50μm of holes center-to-center distance and 4μm of air gap thickness were found to be the best in order to reduce squeeze film damping in capacitive microphone.
dc.description.peerreviewedYes
dc.languageEnglish
dc.publisherIEEE
dc.publisher.placeUnited States
dc.relation.ispartofchapter50458
dc.relation.ispartofconferencenameICSE 2018
dc.relation.ispartofconferencetitleIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
dc.relation.ispartofdatefrom2018-08-15
dc.relation.ispartofdateto2018-08-17
dc.relation.ispartoflocationKuala Lumpur, Malaysia
dc.relation.ispartofpagefrom104
dc.relation.ispartofpageto108
dc.relation.ispartofvolume2018-August
dc.subject.fieldofresearchMicroelectronics
dc.subject.fieldofresearchMicroelectromechanical systems (MEMS)
dc.subject.fieldofresearchcode400908
dc.subject.fieldofresearchcode401705
dc.titleDynamic Behavior of Condenser Microphone Under the Influence of Squeeze Film Damping
dc.typeConference output
dc.type.descriptionE1 - Conferences
dc.type.codeE - Conference Publications
gro.hasfulltextNo Full Text
gro.griffith.authorMohd-Yasin, Faisal


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    Contains papers delivered by Griffith authors at national and international conferences.

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