Show simple item record

dc.contributor.authorMunas, FR
dc.contributor.authorAmarasinghe, YWR
dc.contributor.authorKumarage, P
dc.contributor.authorDao, DV
dc.contributor.authorDau, VT
dc.date.accessioned2019-05-29T12:44:56Z
dc.date.available2019-05-29T12:44:56Z
dc.date.issued2018
dc.identifier.isbn9781538644171
dc.identifier.doi10.1109/MERCon.2018.8421908
dc.identifier.urihttp://hdl.handle.net/10072/382797
dc.description.abstractThis paper presents the design and simulation of MEMS based piezoresistive pressure sensor for microfluidic applications. Geometrical parameters are very much considerable when designing microstructure of the pressure sensor. Hence, an analysis is carried out by changing the dimensional parameters of three different diaphragm geometries namely square shaped diaphragm, circular shaped diaphragm and cross sectional beam shaped diaphragm respectively. This is performed in three dimensional mesh plots using Matlab. The Finite Element Method (FEM) analyses are performed in COMSOL and by comparing the results, the square type diaphragm is chosen as best diaphragm geometry for the microfluidic applications. In addition, modal analysis is carried out by using Ansys to identify the natural frequency of the best diaphragm geometry. Also Piezoresistive sensing elements are designed and simulated by performing coupled field analysis using COMSOL Multiphysics. Simulation results reveal that piezo resistive square type pressure sensors have high sensitivity in a wide range of pressures.
dc.description.peerreviewedYes
dc.publisherIEEE
dc.relation.ispartofconferencename2018 Moratuwa Engineering Research Conference (MERCon)
dc.relation.ispartofconferencetitleMERCon 2018 - 4th International Multidisciplinary Moratuwa Engineering Research Conference
dc.relation.ispartofdatefrom2018-05-30
dc.relation.ispartofdateto2018-06-01
dc.relation.ispartoflocationMoratuwa, Sri Lanka
dc.relation.ispartofpagefrom215
dc.relation.ispartofpageto220
dc.subject.fieldofresearchMechanical Engineering not elsewhere classified
dc.subject.fieldofresearchcode091399
dc.titleDesign and simulation of MEMS based piezoresitive pressure sensor for microfluidic applications
dc.typeConference output
dc.type.descriptionE1 - Conferences
dc.type.codeE - Conference Publications
dc.description.versionPost-print
gro.rights.copyright© 2018 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
gro.hasfulltextFull Text
gro.griffith.authorDao, Dzung V.
gro.griffith.authorDau, Van


Files in this item

This item appears in the following Collection(s)

  • Conference outputs
    Contains papers delivered by Griffith authors at national and international conferences.

Show simple item record