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  • Experimental investigation of actuation in a micromachined electrically floating tunable capacitor

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    Lu218238.pdf (748.1Kb)
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    post-print
    Author(s)
    Khan, F
    Lu, J
    Zhu, Y
    Griffith University Author(s)
    Lu, Junwei
    Zhu, Yong
    Year published
    2019
    Metadata
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    Abstract
    In this paper, a tunable parallel plate capacitor with an electrically floating plate has been designed, micromachined and characterized. The device is fabricated from a single metal layer based on a low-cost standard process. The floating tunable capacitor exhibits a higher quality factor (Q-factor) compared to a traditional non-floating capacitor by eliminating the spring's resistive loss in radio frequency (RF) signal path. To minimize the size of the whole device, the tunable capacitor is designed to be actuated using the same parallel plates. Experimental results show that the capacitor has a wide capacitance tuning ...
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    In this paper, a tunable parallel plate capacitor with an electrically floating plate has been designed, micromachined and characterized. The device is fabricated from a single metal layer based on a low-cost standard process. The floating tunable capacitor exhibits a higher quality factor (Q-factor) compared to a traditional non-floating capacitor by eliminating the spring's resistive loss in radio frequency (RF) signal path. To minimize the size of the whole device, the tunable capacitor is designed to be actuated using the same parallel plates. Experimental results show that the capacitor has a wide capacitance tuning range of 225% and a high Q-factor of 1150 at 60 MHz. The total size of the device is 1.70 × 1.08 mm2.
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    Journal Title
    Microelectronic Engineering
    Volume
    213
    DOI
    https://doi.org/10.1016/j.mee.2019.02.007
    Copyright Statement
    © 2019 Elsevier. Licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International Licence (http://creativecommons.org/licenses/by-nc-nd/4.0/) which permits unrestricted, non-commercial use, distribution and reproduction in any medium, providing that the work is properly cited.
    Subject
    Condensed matter physics
    Other physical sciences
    Electrical engineering
    Electronics, sensors and digital hardware
    Publication URI
    http://hdl.handle.net/10072/384540
    Collection
    • Journal articles

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