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dc.contributor.authorKhan, F
dc.contributor.authorLu, J
dc.contributor.authorZhu, Y
dc.date.accessioned2019-07-31T06:02:25Z
dc.date.available2019-07-31T06:02:25Z
dc.date.issued2019
dc.identifier.issn0167-9317
dc.identifier.doi10.1016/j.mee.2019.02.007
dc.identifier.urihttp://hdl.handle.net/10072/384540
dc.description.abstractIn this paper, a tunable parallel plate capacitor with an electrically floating plate has been designed, micromachined and characterized. The device is fabricated from a single metal layer based on a low-cost standard process. The floating tunable capacitor exhibits a higher quality factor (Q-factor) compared to a traditional non-floating capacitor by eliminating the spring's resistive loss in radio frequency (RF) signal path. To minimize the size of the whole device, the tunable capacitor is designed to be actuated using the same parallel plates. Experimental results show that the capacitor has a wide capacitance tuning range of 225% and a high Q-factor of 1150 at 60 MHz. The total size of the device is 1.70 × 1.08 mm2.
dc.description.peerreviewedYes
dc.languageEnglish
dc.publisherElsevier
dc.relation.ispartofpagefrom31
dc.relation.ispartofpageto34
dc.relation.ispartofjournalMicroelectronic Engineering
dc.relation.ispartofvolume213
dc.subject.fieldofresearchElectrical and Electronic Engineering
dc.subject.fieldofresearchCondensed Matter Physics
dc.subject.fieldofresearchOther Physical Sciences
dc.subject.fieldofresearchcode0906
dc.subject.fieldofresearchcode0204
dc.subject.fieldofresearchcode0299
dc.titleExperimental investigation of actuation in a micromachined electrically floating tunable capacitor
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
dcterms.licensehttp://creativecommons.org/licenses/by-nc-nd/4.0/
dc.description.versionpost-print
gro.rights.copyright© 2019 Elsevier. Licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International Licence (http://creativecommons.org/licenses/by-nc-nd/4.0/) which permits unrestricted, non-commercial use, distribution and reproduction in any medium, providing that the work is properly cited.
gro.hasfulltextFull Text
gro.griffith.authorLu, Junwei
gro.griffith.authorZhu, Yong


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