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  • Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

    Author(s)
    Dinh, Toan
    Nguyen, Nam-Trung
    Dao, Dzung Viet
    Griffith University Author(s)
    Dao, Dzung V.
    Nguyen, Nam-Trung
    Dinh, Toan K.
    Year published
    2018
    Metadata
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    Abstract
    This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides ...
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    This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.
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    DOI
    https://doi.org/10.1007/978-981-13-2571-7
    Subject
    Environmental Sciences not elsewhere classified
    Publication URI
    http://hdl.handle.net/10072/384824
    Collection
    • Books

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