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  • A Resonant Micromachined Electrostatic Charge Sensor

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    69090_1.pdf (654.1Kb)
    Author(s)
    Zhu, Yong
    Lee, Joshua E-Y
    Seshia, Ashwin A
    Griffith University Author(s)
    Zhu, Yong
    Year published
    2008
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    Abstract
    A micromachined electrometer, based on the concept of a variable capacitor, has been designed, modeled, fabricated, and tested. The device presented in this paper functions as a modulated variable capacitor, wherein a dc charge to be measured is up-modulated and converted to an ac voltage output, thus improving the signal-to-noise ratio. The device was fabricated in a commercial standard SOI micromachining process without the need for any additional processing steps. The electrometer was tested in both air and vacuum at room temperature. In air, it has a charge-to-voltage conversion gain of 2.06 nV/e, and a measured ...
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    A micromachined electrometer, based on the concept of a variable capacitor, has been designed, modeled, fabricated, and tested. The device presented in this paper functions as a modulated variable capacitor, wherein a dc charge to be measured is up-modulated and converted to an ac voltage output, thus improving the signal-to-noise ratio. The device was fabricated in a commercial standard SOI micromachining process without the need for any additional processing steps. The electrometer was tested in both air and vacuum at room temperature. In air, it has a charge-to-voltage conversion gain of 2.06 nV/e, and a measured charge noise floor of 52.4 e/rtHz. To reduce the effects of input leakage current, an electrically isolated capacitor has been introduced between the variable capacitor and input to sensor electronics. Methods to improve the sensitivity and resolution are suggested while the long-term stability of these sensors is modeled and discussed.
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    Journal Title
    IEEE Sensors Journal
    Volume
    8
    Issue
    9
    DOI
    https://doi.org/10.1109/JSEN.2008.923597
    Copyright Statement
    © 2008 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
    Subject
    Atomic, molecular and optical physics
    Mechanical engineering
    Microelectromechanical systems (MEMS)
    Publication URI
    http://hdl.handle.net/10072/38525
    Collection
    • Journal articles

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