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dc.contributor.authorZhu, Yong
dc.contributor.authorLee, Joshua E-Y
dc.contributor.authorSeshia, Ashwin A
dc.date.accessioned2017-05-03T16:01:27Z
dc.date.available2017-05-03T16:01:27Z
dc.date.issued2008
dc.date.modified2011-10-18T07:26:21Z
dc.identifier.issn1530-437X
dc.identifier.doi10.1109/JSEN.2008.923597
dc.identifier.urihttp://hdl.handle.net/10072/38525
dc.description.abstractA micromachined electrometer, based on the concept of a variable capacitor, has been designed, modeled, fabricated, and tested. The device presented in this paper functions as a modulated variable capacitor, wherein a dc charge to be measured is up-modulated and converted to an ac voltage output, thus improving the signal-to-noise ratio. The device was fabricated in a commercial standard SOI micromachining process without the need for any additional processing steps. The electrometer was tested in both air and vacuum at room temperature. In air, it has a charge-to-voltage conversion gain of 2.06 nV/e, and a measured charge noise floor of 52.4 e/rtHz. To reduce the effects of input leakage current, an electrically isolated capacitor has been introduced between the variable capacitor and input to sensor electronics. Methods to improve the sensitivity and resolution are suggested while the long-term stability of these sensors is modeled and discussed.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.format.extent669823 bytes
dc.format.mimetypeapplication/pdf
dc.languageEnglish
dc.language.isoen_AU
dc.publisherIEEE
dc.publisher.placeUnited States
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom1499
dc.relation.ispartofpageto1505
dc.relation.ispartofissue9
dc.relation.ispartofjournalIEEE Sensors Journal
dc.relation.ispartofvolume8
dc.rights.retentionY
dc.subject.fieldofresearchMicroelectromechanical Systems (MEMS)
dc.subject.fieldofresearchElectrical and Electronic Engineering
dc.subject.fieldofresearchMechanical Engineering
dc.subject.fieldofresearchOptical Physics
dc.subject.fieldofresearchcode091306
dc.subject.fieldofresearchcode0906
dc.subject.fieldofresearchcode0913
dc.subject.fieldofresearchcode0205
dc.titleA Resonant Micromachined Electrostatic Charge Sensor
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.rights.copyright© 2008 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
gro.date.issued2008
gro.hasfulltextFull Text
gro.griffith.authorZhu, Yong


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