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dc.contributor.authorZhu, Yongen_US
dc.contributor.authorE.-Y. Lee, Joshuaen_US
dc.contributor.authorA. Seshia, Ashwinen_US
dc.date.accessioned2017-05-03T16:01:27Z
dc.date.available2017-05-03T16:01:27Z
dc.date.issued2008en_US
dc.date.modified2011-10-18T07:26:21Z
dc.identifier.issn1530437Xen_US
dc.identifier.doi10.1109/JSEN.2008.923597en_AU
dc.identifier.urihttp://hdl.handle.net/10072/38525
dc.description.abstractA micromachined electrometer, based on the concept of a variable capacitor, has been designed, modeled, fabricated, and tested. The device presented in this paper functions as a modulated variable capacitor, wherein a dc charge to be measured is up-modulated and converted to an ac voltage output, thus improving the signal-to-noise ratio. The device was fabricated in a commercial standard SOI micromachining process without the need for any additional processing steps. The electrometer was tested in both air and vacuum at room temperature. In air, it has a charge-to-voltage conversion gain of 2.06 nV/e, and a measured charge noise floor of 52.4 e/rtHz. To reduce the effects of input leakage current, an electrically isolated capacitor has been introduced between the variable capacitor and input to sensor electronics. Methods to improve the sensitivity and resolution are suggested while the long-term stability of these sensors is modeled and discussed.en_US
dc.description.peerreviewedYesen_US
dc.description.publicationstatusYesen_AU
dc.format.extent669823 bytes
dc.format.mimetypeapplication/pdf
dc.languageEnglishen_US
dc.language.isoen_AU
dc.publisherIEEEen_US
dc.publisher.placeUnited Statesen_US
dc.relation.ispartofstudentpublicationNen_AU
dc.relation.ispartofpagefrom1499en_US
dc.relation.ispartofpageto1505en_US
dc.relation.ispartofissue9en_US
dc.relation.ispartofjournalIEEE Sensors Journalen_US
dc.relation.ispartofvolume8en_US
dc.rights.retentionYen_AU
dc.subject.fieldofresearchMicroelectromechanical Systems (MEMS)en_US
dc.subject.fieldofresearchcode091306en_US
dc.titleA Resonant Micromachined Electrostatic Charge Sensoren_US
dc.typeJournal articleen_US
dc.type.descriptionC1 - Peer Reviewed (HERDC)en_US
dc.type.codeC - Journal Articlesen_US
gro.rights.copyright© 2008 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.en_US
gro.date.issued2008
gro.hasfulltextFull Text


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