dc.contributor.author | Lee, JE-Y | |
dc.contributor.author | Zhu, Y | |
dc.contributor.author | Seshia, AA | |
dc.date.accessioned | 2017-05-03T16:01:28Z | |
dc.date.available | 2017-05-03T16:01:28Z | |
dc.date.issued | 2008 | |
dc.date.modified | 2011-05-03T04:47:59Z | |
dc.identifier.issn | 0960-1317 | |
dc.identifier.doi | 10.1088/0960-1317/18/6/064001 | |
dc.identifier.uri | http://hdl.handle.net/10072/38562 | |
dc.description.abstract | This paper details a bulk acoustic mode resonator fabricated in single-crystal silicon with a quality factor of 15 000 in air, and over a million below 10 mTorr at a resonant frequency of 2.18 MHz. The resonator is a square plate that is excited in the square-extensional mode and has been fabricated in a commercial foundry silicon-on-insulator (SOI) MEMS process through MEMSCAP. This paper also presents a simple method of extracting resonator parameters from raw measurements heavily buried in electrical feedthrough. Its accuracy has been demonstrated through a comparison between extracted motional resistance values measured at different voltage biases and those predicted from an analytical model. Finally, a method of substantially cancelling electrical feedthrough through system-level electronic implementation is also introduced. | |
dc.description.peerreviewed | Yes | |
dc.description.publicationstatus | Yes | |
dc.language | English | |
dc.language.iso | eng | |
dc.publisher | Institute of Physics | |
dc.publisher.place | Washington | |
dc.relation.ispartofstudentpublication | N | |
dc.relation.ispartofpagefrom | 0640011 | |
dc.relation.ispartofpageto | 0640016 | |
dc.relation.ispartofissue | 6 | |
dc.relation.ispartofjournal | Journal of Micromechanics and Microengineering | |
dc.relation.ispartofvolume | 18 | |
dc.rights.retention | Y | |
dc.subject.fieldofresearch | Engineering | |
dc.subject.fieldofresearch | Microelectromechanical systems (MEMS) | |
dc.subject.fieldofresearchcode | 40 | |
dc.subject.fieldofresearchcode | 401705 | |
dc.title | A bulk acoustic mode single-crystal silicon microresonator with a high-quality factor | |
dc.type | Journal article | |
dc.type.description | C1 - Articles | |
dc.type.code | C - Journal Articles | |
gro.date.issued | 2008 | |
gro.hasfulltext | No Full Text | |
gro.griffith.author | Zhu, Yong | |