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dc.contributor.authorLee, JE-Y
dc.contributor.authorZhu, Y
dc.contributor.authorSeshia, AA
dc.date.accessioned2017-05-03T16:01:28Z
dc.date.available2017-05-03T16:01:28Z
dc.date.issued2008
dc.date.modified2011-05-03T04:47:59Z
dc.identifier.issn0960-1317
dc.identifier.doi10.1088/0960-1317/18/6/064001
dc.identifier.urihttp://hdl.handle.net/10072/38562
dc.description.abstractThis paper details a bulk acoustic mode resonator fabricated in single-crystal silicon with a quality factor of 15 000 in air, and over a million below 10 mTorr at a resonant frequency of 2.18 MHz. The resonator is a square plate that is excited in the square-extensional mode and has been fabricated in a commercial foundry silicon-on-insulator (SOI) MEMS process through MEMSCAP. This paper also presents a simple method of extracting resonator parameters from raw measurements heavily buried in electrical feedthrough. Its accuracy has been demonstrated through a comparison between extracted motional resistance values measured at different voltage biases and those predicted from an analytical model. Finally, a method of substantially cancelling electrical feedthrough through system-level electronic implementation is also introduced.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.languageEnglish
dc.language.isoeng
dc.publisherInstitute of Physics
dc.publisher.placeWashington
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom0640011
dc.relation.ispartofpageto0640016
dc.relation.ispartofissue6
dc.relation.ispartofjournalJournal of Micromechanics and Microengineering
dc.relation.ispartofvolume18
dc.rights.retentionY
dc.subject.fieldofresearchEngineering
dc.subject.fieldofresearchMicroelectromechanical systems (MEMS)
dc.subject.fieldofresearchcode40
dc.subject.fieldofresearchcode401705
dc.titleA bulk acoustic mode single-crystal silicon microresonator with a high-quality factor
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.date.issued2008
gro.hasfulltextNo Full Text
gro.griffith.authorZhu, Yong


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