Room temperature electrometry with SUB-10 electron charge resolution
Author(s)
Lee, Joshua
Zhu, Yong
Seshia, Ashwin
Griffith University Author(s)
Year published
2008
Metadata
Show full item recordAbstract
We have fabricated and demonstrated a micromachined electrometer with a charge resolution of 6 e/vHz, operating at room temperature and ambient pressure. We thus show that high-resolution electrometry is realizable at room temperature and competitive with alternative low temperature (<10 K) solutions. The device presented in this paper functions as a modulated variable capacitor, wherein a dc charge to be measured is modulated and converted to an ac voltage output. By reviewing a selection of different devices based on this concept, we show that single-electron charge resolution at room temperature and ambient pressure is ...
View more >We have fabricated and demonstrated a micromachined electrometer with a charge resolution of 6 e/vHz, operating at room temperature and ambient pressure. We thus show that high-resolution electrometry is realizable at room temperature and competitive with alternative low temperature (<10 K) solutions. The device presented in this paper functions as a modulated variable capacitor, wherein a dc charge to be measured is modulated and converted to an ac voltage output. By reviewing a selection of different devices based on this concept, we show that single-electron charge resolution at room temperature and ambient pressure is achievable with the aid of practical design considerations.
View less >
View more >We have fabricated and demonstrated a micromachined electrometer with a charge resolution of 6 e/vHz, operating at room temperature and ambient pressure. We thus show that high-resolution electrometry is realizable at room temperature and competitive with alternative low temperature (<10 K) solutions. The device presented in this paper functions as a modulated variable capacitor, wherein a dc charge to be measured is modulated and converted to an ac voltage output. By reviewing a selection of different devices based on this concept, we show that single-electron charge resolution at room temperature and ambient pressure is achievable with the aid of practical design considerations.
View less >
Journal Title
Journal of Micromechanics and Microengineering
Volume
18
Issue
2
Subject
Microelectromechanical Systems (MEMS)
Engineering
Technology