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  • Room temperature electrometry with SUB-10 electron charge resolution

    Author(s)
    Lee, Joshua
    Zhu, Yong
    Seshia, Ashwin
    Griffith University Author(s)
    Zhu, Yong
    Year published
    2008
    Metadata
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    Abstract
    We have fabricated and demonstrated a micromachined electrometer with a charge resolution of 6 e/vHz, operating at room temperature and ambient pressure. We thus show that high-resolution electrometry is realizable at room temperature and competitive with alternative low temperature (<10 K) solutions. The device presented in this paper functions as a modulated variable capacitor, wherein a dc charge to be measured is modulated and converted to an ac voltage output. By reviewing a selection of different devices based on this concept, we show that single-electron charge resolution at room temperature and ambient pressure is ...
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    We have fabricated and demonstrated a micromachined electrometer with a charge resolution of 6 e/vHz, operating at room temperature and ambient pressure. We thus show that high-resolution electrometry is realizable at room temperature and competitive with alternative low temperature (<10 K) solutions. The device presented in this paper functions as a modulated variable capacitor, wherein a dc charge to be measured is modulated and converted to an ac voltage output. By reviewing a selection of different devices based on this concept, we show that single-electron charge resolution at room temperature and ambient pressure is achievable with the aid of practical design considerations.
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    Journal Title
    Journal of Micromechanics and Microengineering
    Volume
    18
    Issue
    2
    DOI
    https://doi.org/10.1088/0960-1317/18/2/025033
    Subject
    Microelectromechanical Systems (MEMS)
    Engineering
    Technology
    Publication URI
    http://hdl.handle.net/10072/38563
    Collection
    • Journal articles

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