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dc.contributor.authorIqbal, A
dc.contributor.authorWalker, G
dc.contributor.authorHold, L
dc.contributor.authorFernandes, A
dc.contributor.authorLacopi, A
dc.contributor.authorMohd-Yasin, F
dc.date.accessioned2019-12-10T23:49:32Z
dc.date.available2019-12-10T23:49:32Z
dc.date.issued2019
dc.identifier.issn0957-4522
dc.identifier.doi10.1007/s10854-019-02480-w
dc.identifier.urihttp://hdl.handle.net/10072/389603
dc.description.abstractWe perform pulsed DC sputtering of aluminium nitride (002) thin films on top of cubic silicon carbide-on-silicon (100) substrates at different substrate temperatures and deposition powers. The films are characterized using the following parameters: FWHM of diffraction peak, FWHM of the rocking curve, residual stress, thickness, deposition rate, grain size, and surface roughness. The overall quality of the films improve at escalated temperature and power. However, they have hillocks on the surface, which is caused by high amount of tensile stress.
dc.description.peerreviewedYes
dc.languageEnglish
dc.language.isoeng
dc.publisherSpringer Science and Business Media LLC
dc.relation.ispartofpagefrom1
dc.relation.ispartofpageto10
dc.relation.ispartofjournalJournal of Materials Science: Materials in Electronics
dc.subject.fieldofresearchElectrical and Electronic Engineering
dc.subject.fieldofresearchMaterials Engineering
dc.subject.fieldofresearchcode0906
dc.subject.fieldofresearchcode0912
dc.titleSputtering of aluminium nitride (002) film on cubic silicon carbide on silicon (100) substrate: influences of substrate temperature and deposition power
dc.typeJournal article
dc.type.descriptionC1 - Articles
dcterms.bibliographicCitationIqbal, A; Walker, G; Hold, L; Fernandes, A; Lacopi, A; Mohd-Yasin, F, Sputtering of aluminium nitride (002) film on cubic silicon carbide on silicon (100) substrate: influences of substrate temperature and deposition power, Journal of Materials Science: Materials in Electronics
dc.date.updated2019-12-07T00:47:03Z
dc.description.versionAccepted Manuscript (AM)
gro.description.notepublicThis publication has been entered into Griffith Research Online as an Advanced Online Version
gro.rights.copyright© 2019 Springer New York. This is an electronic version of an article published in Journal of Materials Science: Materials in Electronics pp 1–10, 2019. Journal of Materials Science: Materials in Electronics is available online at: http://link.springer.com/ with the open URL of your article.
gro.hasfulltextFull Text
gro.griffith.authorMohd-Yasin, Faisal
gro.griffith.authorIqbal, Abid
gro.griffith.authorWalker, Glenn M.
gro.griffith.authorHold, Leonie K.


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