Effects of nitridation in gate oxides grown on 4H-SiC

Author
Jamet, Philippe
Dimitrijev, Sima
Tanner, Philip
Year published
2001
Metadata
Show full item record
Journal Title
Journal of Applied Physics
Volume
90
Issue
10
DOI
Copyright Statement
© 2001 American Institute of Physics: Reproduced in accordance with the copyright policy of the publisher: This journal is available online - use hypertext links.
Publication URI
Collection