Effects of nitridation in gate oxides grown on 4H-SiC

Author(s)
Jamet, P
Dimitrijev, S
Tanner, P
Griffith University Author(s)
Year published
2001
Metadata
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Journal Title
Journal of Applied Physics
Volume
90
Issue
10
DOI
Copyright Statement
© 2001 American Institute of Physics: Reproduced in accordance with the copyright policy of the publisher: This journal is available online - use hypertext links.
Subject
Mathematical sciences
Physical sciences
Engineering
Publication URI
Collection