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dc.contributor.authorNguyen, T
dc.contributor.authorDInh, T
dc.contributor.authorMd Foisal, AR
dc.contributor.authorPhan, HP
dc.contributor.authorNguyen, TK
dc.contributor.authorNguyen, NT
dc.contributor.authorDao, DV
dc.date.accessioned2020-03-19T23:50:33Z
dc.date.available2020-03-19T23:50:33Z
dc.date.issued2019
dc.identifier.isbn978-1-5386-8104-6
dc.identifier.doi10.1109/TRANSDUCERS.2019.8808394
dc.identifier.urihttp://hdl.handle.net/10072/392480
dc.description.abstractHere we report for the first time an ultra-sensitive opto-piezoresistive effect in cubic silicon carbide (3C-SiC) nanofilms grown on silicon (Si). The sensitivity of the sensor was significantly enhanced by coupling the photovoltaic effect and controlling distribution of hole/electron in semiconductors. By applying this method, the gauge factor (GF) of strain sensors can be improved at least three orders of magnitude compared to conventional MEMS sensor. A GF of approximately 58,000 was observed, which is the highest GF reported for semiconductor piezoresistive sensors to date. Consequently, our findings can be deployed to develop ultra-sensitive mechanical sensors and MEMS/NEMS sensing applications.
dc.description.peerreviewedYes
dc.languageEnglish
dc.publisherIEEE
dc.relation.ispartofconferencenameTransducers 2019 and EUROSENSORS XXXIII
dc.relation.ispartofconferencetitle2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
dc.relation.ispartofdatefrom2019-06-23
dc.relation.ispartofdateto2019-06-27
dc.relation.ispartoflocationBerlin, Germany
dc.relation.ispartofpagefrom2057
dc.relation.ispartofpageto2060
dc.subject.fieldofresearchLasers and quantum electronics
dc.subject.fieldofresearchcode510202
dc.titleUltra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures
dc.typeConference output
dc.type.descriptionE1 - Conferences
dcterms.bibliographicCitationNguyen, T; DInh, T; Md Foisal, AR; Phan, HP; Nguyen, TK; Nguyen, NT; Dao, DV, Ultra-Sensitive OPTO-Piezoresistive Sensors Utilising 3C-SiC/Si Heterostructures, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, 2019, pp. 2057-2060
dc.date.updated2020-03-19T05:48:28Z
dc.description.versionAccepted Manuscript (AM)
gro.rights.copyright© 2019 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
gro.hasfulltextFull Text
gro.griffith.authorNguyen, Nam-Trung
gro.griffith.authorPhan, Hoang Phuong
gro.griffith.authorDinh, Toan K.
gro.griffith.authorMd Foisal, Abu R.
gro.griffith.authorNguyen, Viet Thanh T.
gro.griffith.authorDao, Dzung V.
gro.griffith.authorNguyen Tuan, Khoa


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