A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator

Lee, Joshua E-Y; Bahreyni, Behraad; Zhu, Yong; Seshia, Ashwin A

doi:10.1109/LED.2008.2000643

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Author(s)

Lee, Joshua E-Y

Bahreyni, Behraad

Zhu, Yong

Seshia, Ashwin A

Griffith University Author(s)

Zhu, Yong

Year published

2008

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Abstract

A timing reference incorporating a single-crystalsilicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured shortterm Allan deviation of 0.6 ppb.A timing reference incorporating a single-crystalsilicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured shortterm Allan deviation of 0.6 ppb.
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Journal Title

IEEE Electron Device Letters

Volume

Issue

DOI

https://doi.org/10.1109/LED.2008.2000643

Copyright Statement

© 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.

Subject

Microelectromechanical systems (MEMS)

Publication URI

http://hdl.handle.net/10072/40443

Collection

Journal articles