A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator

Abstract

A timing reference incorporating a single-crystalsilicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured shortterm Allan deviation of 0.6 ppb.