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  • A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator

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    Author(s)
    Lee, Joshua E-Y
    Bahreyni, Behraad
    Zhu, Yong
    Seshia, Ashwin A
    Griffith University Author(s)
    Zhu, Yong
    Year published
    2008
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    Abstract
    A timing reference incorporating a single-crystalsilicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured shortterm Allan deviation of 0.6 ppb.A timing reference incorporating a single-crystalsilicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured shortterm Allan deviation of 0.6 ppb.
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    Journal Title
    IEEE Electron Device Letters
    Volume
    29
    Issue
    7
    DOI
    https://doi.org/10.1109/LED.2008.2000643
    Copyright Statement
    © 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
    Subject
    Microelectromechanical systems (MEMS)
    Publication URI
    http://hdl.handle.net/10072/40443
    Collection
    • Journal articles

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