Show simple item record

A Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator

dc.contributor.authorLee, Joshua E-Y
dc.contributor.authorBahreyni, Behraad
dc.contributor.authorZhu, Yong
dc.contributor.authorSeshia, Ashwin A
dc.date.accessioned2017-05-03T16:01:28Z
dc.date.available2017-05-03T16:01:28Z
dc.date.issued2008
dc.date.modified2011-10-20T06:39:34Z
dc.identifier.issn0741-3106
dc.identifier.doi10.1109/LED.2008.2000643
dc.identifier.urihttp://hdl.handle.net/10072/40443
dc.description.abstractA timing reference incorporating a single-crystalsilicon micromechanical resonator with a quality factor of larger than one million and a resonant frequency of 2.18 MHz is demonstrated. The resonator is excited in the square extensional bulk acoustic mode at 4 mtorr, and it has been fabricated in a foundry SOI MEMS process. The silicon microresonator is adapted as a timing element for a precision oscillator with a measured shortterm Allan deviation of 0.6 ppb.
dc.description.peerreviewedYes
dc.description.publicationstatusYes
dc.format.extent374859 bytes
dc.format.mimetypeapplication/pdf
dc.languageEnglish
dc.language.isoeng
dc.publisherIEEE
dc.publisher.placeUnited States
dc.relation.ispartofstudentpublicationN
dc.relation.ispartofpagefrom701
dc.relation.ispartofpageto703
dc.relation.ispartofissue7
dc.relation.ispartofjournalIEEE Electron Device Letters
dc.relation.ispartofvolume29
dc.rights.retentionY
dc.subject.fieldofresearchMicroelectromechanical systems (MEMS)
dc.subject.fieldofresearchcode401705
dc.titleA Single-Crystal-Silicon Bulk-Acoustic-Mode Microresonator Oscillator
dc.typeJournal article
dc.type.descriptionC1 - Articles
dc.type.codeC - Journal Articles
gro.rights.copyright© 2008 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.
gro.date.issued2008
gro.hasfulltextFull Text
gro.griffith.authorZhu, Yong


Files in this item

Name:
69093_1.pdf
Size:
366.0Kb
Format:
PDF
View/Open

This item appears in the following Collection(s)

  • Journal articles
    Contains articles published by Griffith authors in scholarly journals.

Show simple item record