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dc.contributor.authorLeech, PW
dc.contributor.authorKibel, MH
dc.contributor.authorTanner, P
dc.description.abstractAbstract: The modified sheet resistance, Rsk, and specific contact resistance, ρc, of Ni-, Pt- and Ti-based contacts to n-type 3C-SiC have been measured using the circular transmission line model (CTLM). The Ni/Pt/Ni/Pt and Pt/Ni contacts have shown a continuous decrease in Rsk and ρc as a function of annealing temperature from 20 to 1000 °C. A minimum value of Rsk of 5.5 Ω/sq was obtained for Ni/Pt/Ni/Pt contacts at 1000 °C. In comparison, the Ti/Pt and Ti/Ni/Au contacts have shown a significant reduction in Rsk and ρc only after annealing at 900–1000 °C. The ratio of Rsh/Rsk has been determined for each type of contact after annealing at 1000 °C.en_US
dc.publisherSpringer Science and Business Media LLCen_US
dc.relation.ispartofjournalMRS Advancesen_US
dc.titleModified sheet resistance and specific contact resistance of Ni-, Pt- and Ti-based contacts to n-type 3C-SiCen_US
dc.typeJournal articleen_US
dc.type.descriptionC1 - Articlesen_US
dcterms.bibliographicCitationLeech, P.W., Kibel, M.H. & Tanner, P. Modified sheet resistance and specific contact resistance of Ni-, Pt- and Ti-based contacts to n-type 3C-SiC. MRS Advances (2021).
gro.rights.copyright© 2021 Materials Research Society. The attached file is reproduced here in accordance with the copyright policy of the publisher. Please refer to the journal's website for access to the definitive, published version.en_US
gro.hasfulltextNo Full Text
gro.griffith.authorTanner, Philip G.

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