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dc.contributor.authorLeech, PW
dc.contributor.authorKibel, MH
dc.contributor.authorTanner, P
dc.date.accessioned2021-07-23T05:10:39Z
dc.date.available2021-07-23T05:10:39Z
dc.date.issued2021-05
dc.identifier.issn2059-8521
dc.identifier.doi10.1557/s43580-021-00072-7
dc.identifier.urihttp://hdl.handle.net/10072/406258
dc.description.abstractAbstract: The modified sheet resistance, Rsk, and specific contact resistance, ρc, of Ni-, Pt- and Ti-based contacts to n-type 3C-SiC have been measured using the circular transmission line model (CTLM). The Ni/Pt/Ni/Pt and Pt/Ni contacts have shown a continuous decrease in Rsk and ρc as a function of annealing temperature from 20 to 1000 °C. A minimum value of Rsk of 5.5 Ω/sq was obtained for Ni/Pt/Ni/Pt contacts at 1000 °C. In comparison, the Ti/Pt and Ti/Ni/Au contacts have shown a significant reduction in Rsk and ρc only after annealing at 900–1000 °C. The ratio of Rsh/Rsk has been determined for each type of contact after annealing at 1000 °C.
dc.description.peerreviewedYes
dc.languageEnglish
dc.publisherSpringer Science and Business Media LLC
dc.relation.ispartofjournalMRS Advances
dc.subject.fieldofresearchNanomaterials
dc.subject.fieldofresearchcode401807
dc.titleModified sheet resistance and specific contact resistance of Ni-, Pt- and Ti-based contacts to n-type 3C-SiC
dc.typeJournal article
dc.type.descriptionC1 - Articles
dcterms.bibliographicCitationLeech, P.W., Kibel, M.H. & Tanner, P. Modified sheet resistance and specific contact resistance of Ni-, Pt- and Ti-based contacts to n-type 3C-SiC. MRS Advances (2021). https://doi.org/10.1557/s43580-021-00072-7
dcterms.licensehttps://creativecommons.org/licenses/by-nc-nd/4.0/
dc.date.updated2021-07-20T00:32:47Z
gro.rights.copyright© 2021 Materials Research Society. The attached file is reproduced here in accordance with the copyright policy of the publisher. Please refer to the journal's website for access to the definitive, published version.
gro.hasfulltextNo Full Text
gro.griffith.authorTanner, Philip G.


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