Reliability Measurement of Single Axis Capacitive Accelerometers Employing Mechanical, Thermal and Acoustic stresses
Abstract
The purpose of this paper is to employ the QALT procedure on single axis accelerometers from Analog Device and Freescale. Laser-precision apparatus was designed, built, and employed to provide three types of excitations with great accuracy; mechanical (gravitational) test, thermal test and acoustical test. These tests are designed to mimic the operating conditions of the system, where the devices are employed.
Conference Title
2009 International Semiconductor Device Research Symposium, ISDRS '09
Copyright Statement
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Subject
Electrical and Electronic Engineering not elsewhere classified