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dc.contributor.authorPhuc, Hong Pham
dc.contributor.authorLam, Bao Dang
dc.contributor.authorViet, Hoang Nguyen
dc.contributor.authorVan, Thanh Dau
dc.date.accessioned2021-09-23T02:15:48Z
dc.date.available2021-09-23T02:15:48Z
dc.date.issued2017
dc.identifier.issn0946-7076
dc.identifier.doi10.1007/s00542-017-3422-9
dc.identifier.urihttp://hdl.handle.net/10072/408257
dc.description.abstractIn this paper, we improve and develop a micro cam system, in which reciprocating linear movement of two electrostatic linear comb-drive actuators (ELCA) is transformed into the unilateral rotation of a cam rim through six elastic wings of motion-transmission mechanisms. The system was fabricated by using SOI-MEMS technology and only one photo mask. Our experimental results show that the new micro cam system runs stably while the driving frequency ranging from 1 to 30 Hz with the driving voltage Vpp = 100 V. In addition, the average angular velocities of the cam rim matched with the theoretical results better than the velocities measured in the previous micro cam system.
dc.description.peerreviewedYes
dc.languageEnglish
dc.publisherSPRINGER
dc.relation.ispartofpagefrom5669
dc.relation.ispartofpageto5675
dc.relation.ispartofjournalMicrosystem Technologies
dc.relation.ispartofvolume23
dc.subject.fieldofresearchCommunications engineering
dc.subject.fieldofresearchNanotechnology
dc.subject.fieldofresearchcode4006
dc.subject.fieldofresearchcode4018
dc.subject.keywordsScience & Technology
dc.subject.keywordsTechnology
dc.subject.keywordsPhysical Sciences
dc.subject.keywordsEngineering, Electrical & Electronic
dc.subject.keywordsNanoscience & Nanotechnology
dc.titleDevelopment of new electrostatic micro cam system driven by elastic wings
dc.typeJournal article
dc.type.descriptionC1 - Articles
dcterms.bibliographicCitationPhuc, HP; Lam, BD; Viet, HN; Van, TD, Development of new electrostatic micro cam system driven by elastic wings, Microsystem Technologies, 2017, 23, pp. 5669-5675
dc.date.updated2021-09-23T02:13:30Z
gro.hasfulltextNo Full Text
gro.griffith.authorDau, Van


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