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dc.contributor.authorZhu, Yong
dc.contributor.authorPal, Jitendra
dc.date.accessioned2021-10-19T02:56:57Z
dc.date.available2021-10-19T02:56:57Z
dc.date.issued2021
dc.identifier.issn2072-666X
dc.identifier.doi10.3390/mi12101237
dc.identifier.urihttp://hdl.handle.net/10072/409263
dc.description.abstractIn this paper, we report a novel laterally actuated Radio Frequency (RF) Microelectromechanical Systems (MEMS) switch, which is based on a combination of electrothermal actuation and electrostatic latching hold. The switch takes the advantages of both actuation mechanisms: large actuation force, low actuation voltage, and high reliability of the thermal actuation for initial movement; and low power consumption of the electrostatic actuation for holding the switch in position in ON state. The switch with an initial switch gap of 7 µm has an electrothermal actuation voltage of 7 V and an electrostatic holding voltage of 21 V. The switch achieves superior RF performances: the measured insertion loss is −0.73 dB at 6 GHz, whereas the isolation is −46 dB at 6 GHz. In addition, the switch shows high reliability and power handling capability: the switch can operate up to 10 million cycles without failure with 1 W power applied to its signal line.
dc.description.peerreviewedYes
dc.languageen
dc.publisherMDPI AG
dc.relation.ispartofpagefrom1237
dc.relation.ispartofissue10
dc.relation.ispartofjournalMicromachines
dc.relation.ispartofvolume12
dc.subject.fieldofresearchNanotechnology
dc.subject.fieldofresearchcode4018
dc.titleLow-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation
dc.typeJournal article
dc.type.descriptionC1 - Articles
dcterms.bibliographicCitationZhu, Y; Pal, J, Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation, Micromachines, 12 (10), pp. 1237
dcterms.licensehttps://creativecommons.org/licenses/by/4.0/
dc.date.updated2021-10-18T22:19:09Z
dc.description.versionVersion of Record (VoR)
gro.rights.copyright© 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
gro.hasfulltextFull Text
gro.griffith.authorZhu, Yong


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