dc.contributor.author | Zhu, Yong | |
dc.contributor.author | Pal, Jitendra | |
dc.date.accessioned | 2021-10-19T02:56:57Z | |
dc.date.available | 2021-10-19T02:56:57Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2072-666X | |
dc.identifier.doi | 10.3390/mi12101237 | |
dc.identifier.uri | http://hdl.handle.net/10072/409263 | |
dc.description.abstract | In this paper, we report a novel laterally actuated Radio Frequency (RF) Microelectromechanical Systems (MEMS) switch, which is based on a combination of electrothermal actuation and electrostatic latching hold. The switch takes the advantages of both actuation mechanisms: large actuation force, low actuation voltage, and high reliability of the thermal actuation for initial movement; and low power consumption of the electrostatic actuation for holding the switch in position in ON state. The switch with an initial switch gap of 7 µm has an electrothermal actuation voltage of 7 V and an electrostatic holding voltage of 21 V. The switch achieves superior RF performances: the measured insertion loss is −0.73 dB at 6 GHz, whereas the isolation is −46 dB at 6 GHz. In addition, the switch shows high reliability and power handling capability: the switch can operate up to 10 million cycles without failure with 1 W power applied to its signal line. | |
dc.description.peerreviewed | Yes | |
dc.language | en | |
dc.publisher | MDPI AG | |
dc.relation.ispartofpagefrom | 1237 | |
dc.relation.ispartofissue | 10 | |
dc.relation.ispartofjournal | Micromachines | |
dc.relation.ispartofvolume | 12 | |
dc.subject.fieldofresearch | Nanotechnology | |
dc.subject.fieldofresearchcode | 4018 | |
dc.title | Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation | |
dc.type | Journal article | |
dc.type.description | C1 - Articles | |
dcterms.bibliographicCitation | Zhu, Y; Pal, J, Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation, Micromachines, 12 (10), pp. 1237 | |
dcterms.license | https://creativecommons.org/licenses/by/4.0/ | |
dc.date.updated | 2021-10-18T22:19:09Z | |
dc.description.version | Version of Record (VoR) | |
gro.rights.copyright | © 2021 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. | |
gro.hasfulltext | Full Text | |
gro.griffith.author | Zhu, Yong | |