Low Frequency Noise Measurement and Analysis of Capacitive Micro-Accelerometers: Temperature Effect

Author(s)
Mohd-Yasin, Faisal
Nagel, David J
Ong, DS
Korman, Can E
Chuah, HT
Griffith University Author(s)
Year published
2008
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Abstract
A noise measurements of micro-accelerometers were performed using a special measurement system. A common spectral behavior of noise is found, with 1/ f noise dominating at low frequencies and white thermal noise being the limiting factor at higher frequencies. A temperature dependent and an acceleration dependant of the noise are found in the accelerometers, in agreement and contract of the theories, respectively.
Journal Title
Japanese Journal of Applied Physics
Volume
47
Issue
6
DOI
Copyright Statement
Self-archiving of the author-manuscript version is not yet supported by this journal. Please refer to the journal link for access to the definitive, published version or contact the authors for more information.
Subject
Mathematical sciences
Physical sciences
Other physical sciences not elsewhere classified
Engineering
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