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  • Design, Modeling, and Control of a Micromachined Nanopositioner With Integrated Electrothermal Actuation and Sensing

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    Author(s)
    Zhu, Yong
    Bazaei, Ali
    Moheimani, SO Reza
    Yuce, Mehmet Rasit
    Griffith University Author(s)
    Zhu, Yong
    Year published
    2011
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    Abstract
    In this paper, a real-time feedback control of a novel micromachined one-degree-of-freedom thermal nanopositioner with on-chip electrothermal position sensors is presented. The actuation works based on thermal expansion of silicon beams. The sensing mechanism works based on measuring the difference between the electrical resistances of two electrically biased identical silicon beams. The difference increases with displacement, as the heat conductance of the sensor beams varies oppositely with position, resulting in different beam temperatures and resistances. The sensor pair is operated in differential mode to reduce ...
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    In this paper, a real-time feedback control of a novel micromachined one-degree-of-freedom thermal nanopositioner with on-chip electrothermal position sensors is presented. The actuation works based on thermal expansion of silicon beams. The sensing mechanism works based on measuring the difference between the electrical resistances of two electrically biased identical silicon beams. The difference increases with displacement, as the heat conductance of the sensor beams varies oppositely with position, resulting in different beam temperatures and resistances. The sensor pair is operated in differential mode to reduce low-frequency drift. The nanopositioner has a nonlinear static input-output characteristic. An open-loop controller is first designed and implemented. It is experimentally shown that uncertainties and sensor drift result in an unacceptable nanopositioner performance. Hence, feedback control methods are necessary for accurate nanopositioning. A closed-loop feedback control system is designed using a proportional-integral controller together with the nonlinear compensator used for the open-loop control system. The closed-loop system provides an acceptable and robust tracking performance for a wide range of set point values. For triangular reference tracking, which is needed in raster-scanned scanning probe microscopy, the tracking performance of the closed-loop system is further improved by incorporating a feedforward controller.
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    Journal Title
    IEEE Journal of Microelectromechanical Systems
    Volume
    20
    Issue
    3
    DOI
    https://doi.org/10.1109/JMEMS.2011.2140358
    Copyright Statement
    © 2011 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
    Subject
    Microelectronics
    Manufacturing engineering
    Mechanical engineering
    Microelectromechanical systems (MEMS)
    Publication URI
    http://hdl.handle.net/10072/42654
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    • Journal articles

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